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+% This file was created with JabRef 2.5.
+% Encoding: Cp1252
+
+@ARTICLE{Abgr07,
+  author = {P. Abgrall and A.-M. Gué},
+  title = {Lab-on-chip technologies: making a microfluidic network and coupling
+	it into a complete microsystem---a review},
+  journal = {J. Micromech. Microeng.},
+  year = {2007},
+  volume = {17},
+  pages = {R15\,-\,R49},
+  doi = {10.1088/0960-1317/17/5/R01},
+  file = {Abgrall07-Review.pdf:Photolacke\\Abgrall07-Review.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/17/5/R01}
+}
+
+@ARTICLE{Abgr06,
+  author = {P. Abgrall and others},
+  title = {A novel fabrication method of flexible and monolithic {3D microfluidic
+	structures using lamination of SU-8} films},
+  journal = {J. Micromech. Microeng.},
+  year = {2006},
+  volume = {16},
+  pages = {113\,-\,121},
+  doi = {10.1088/0960-1317/16/1/016},
+  file = {SU-8-selbst-hergestellt.pdf:Photolacke\\SU-8-selbst-hergestellt.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/16/1/016}
+}
+
+@ARTICLE{Abol05,
+  author = {S.N. Abolmasov and T. Shirafuji and K. Tachibana},
+  title = {Submillimeter Dielectric Barrier Discharges at Atmospheric Pressure:
+	Edge Effect},
+  journal = {IEEE Trans. Plasma Sci.},
+  year = {2005},
+  volume = {33},
+  pages = {941\,-\,948},
+  doi = {10.1109/TPS.2005.845093},
+  file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF},
+  review = {Priorität 1
+	
+	Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
+  url = {http://dx.doi.org/10.1109/TPS.2005.845093}
+}
+
+@ARTICLE{Akis03,
+  author = {Yu.S. Akishev and A.V. Dem\textrm{'}yanov and V.B. Karal\textrm{'}nik
+	and A.E. Monich and N.I. Trushkin},
+  title = {Comparison of the AC Barrier Corona with DC Positive and Negative
+	Coronas and Barrier Discharge},
+  journal = {Plasma Physics Reports},
+  year = {2003},
+  volume = {29},
+  pages = {90\,-\,100},
+  doi = {10.1134/1.1538505},
+  file = {Akishev-Comparison-BC-dischages-2003.pdf:DBD\\Akishev-Comparison-BC-dischages-2003.pdf:PDF},
+  url = {http://www.triniti.ru/CTF\&VM/Articles/Demyanov3.pdf}
+}
+
+@ARTICLE{Baba01,
+  author = {S.E. Babayan and others},
+  title = {Deposition of silicon dioxide films with a non-equilibrium atmospheric-pressure
+	plasma jet},
+  journal = {Plasma Sources Sci. Technol.},
+  year = {2001},
+  volume = {10},
+  pages = {573\,-\,578},
+  number = {4},
+  doi = {10.1088/0963-0252/10/4/305},
+  file = {:DBD\\Babayan-SiOx-2001.pdf:PDF},
+  publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
+	c1991-},
+  url = {http://dx.doi.org/10.1088/0963-0252/10/4/305}
+}
+
+@ARTICLE{Beck06,
+  author = {K.H. Becker and K.H. Schoenbach and J.G. Eden},
+  title = {Microplasmas and applications},
+  journal = {J. Phys. D: Appl. Phys.},
+  year = {2006},
+  volume = {39},
+  pages = {R55\,-\,R70},
+  doi = {10.1088/0022-3727/39/3/R01},
+  file = {:DBD\\Becker_Overview microplasmas-2006.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/39/3/R01}
+}
+
+@ARTICLE{Bile04,
+  author = {B. Bilenberg and T. Nielsen and B. Clausen and A. Kristensen},
+  title = {PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with
+	integrated optics},
+  journal = {J. Micromech. Microeng.},
+  year = {2004},
+  volume = {14},
+  pages = {814\,-\,818},
+  doi = {10.1088/0960-1317/14/6/008},
+  file = {Bile04.pdf:Photolacke\\Bile04.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/14/6/008}
+}
+
+@ARTICLE{Blan04,
+  author = {F. J. Blanco and others},
+  title = {Novel three-dimensional embedded {SU-8} microchannels fabricated
+	using a low temperature full wafer adhesive bonding},
+  journal = {J. Micromech. Microeng.},
+  year = {2004},
+  volume = {14},
+  pages = {1047\,-\,1056},
+  doi = {10.1088/0960-1317/14/7/027},
+  file = {Blan04.pdf:Photolacke\\Blan04.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/14/7/027}
+}
+
+@ARTICLE{Boga02,
+  author = {A. Bogaerts and E. Neyts and R. Gijbels and J. van der Mullen},
+  title = {Gas discharge plasmas and their applications},
+  journal = {Spectrochim. Acta. B Atom. Spectros.},
+  year = {2002},
+  volume = {57},
+  pages = {609--658},
+  number = {4},
+  doi = {10.1016/S0584-8547(01)00406-2},
+  file = {:Allgemein\\2002_gas discharge plasmas and their applications.pdf:PDF},
+  publisher = {Elsevier},
+  url = {\href{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}}
+}
+
+@BOOK{Bohl1989,
+  title = {Technische Strömungslehre},
+  publisher = {Vogel-Verlag, Würzburg},
+  year = {1989},
+  author = {Willi Bohl},
+  edition = {8th},
+  url = {http://www.worldcat.org/oclc/315749265}
+}
+
+@ARTICLE{Bran07,
+  author = {R. Brandenburg and others},
+  title = {Antimicrobial Treatment of Heat Sensitive Materials by Means of Atmospheric
+	Pressure {Rf}-Driven Plasma Jet},
+  journal = {Contrib. Plasma Phys.},
+  year = {2007},
+  volume = {47},
+  pages = {72\,-\,79},
+  doi = {10.1002/ctpp.200710011},
+  file = {:DBD\\Brandenburg07-PlasmaJet-microbial.pdf:PDF},
+  url = {http://dx.doi.org/10.1002/ctpp.200710011}
+}
+
+@ARTICLE{Bran05,
+  author = {R. Brandenburg and H.-E. Wagner and A.M. Morozov and K.V. Kozlov},
+  title = {Axial and radial development of microdischarges of barrier discharges
+	in {N2/O2} mixtures at atmospheric pressure},
+  journal = {J. Phys. D: Appl. Phys.},
+  year = {2005},
+  volume = {38},
+  pages = {1649\,-\,1657},
+  number = {11},
+  doi = {10.1088/0022-3727/38/11/003},
+  file = {:DBD\\Brandenburg-DBD-characteristics-05.pdf:PDF},
+  publisher = {London: The Institute of Physics and The Physical Society.},
+  url = {http://dx.doi.org/10.1088/0022-3727/38/11/003}
+}
+
+@CONFERENCE{Brea09,
+  author = {M.C. Breadmore and E. Candish and R.M. Guijt},
+  title = {Dry film photoresist, saving time and money without compromising
+	on performance},
+  booktitle = {\textmu TAS 2009},
+  year = {2009}
+}
+
+@BOOK{Bruu08,
+  title = {Theoretical Microfluidics},
+  publisher = {Oxford University Press},
+  year = {2008},
+  author = {Henrik Bruus},
+  url = {http://www.worldcat.org/oclc/176807166}
+}
+
+@ARTICLE{Bull01,
+  author = {N.A. Bullett and others},
+  title = {Direct imaging of plasma-polymerized chemical micropatterns},
+  journal = {Surf. Interface Anal.},
+  year = {2001},
+  volume = {31},
+  pages = {1074\,-\,1076},
+  number = {11},
+  doi = {10.1002/sia.1146},
+  file = {:DBD\\Bullett-SEM mask pattern-2001.pdf:PDF},
+  url = {http://dx.doi.org/10.1002/sia.1146}
+}
+
+@ARTICLE{Carl04,
+  author = {J. Carlier and others},
+  title = {Integrated microfluidics based on multi-layered SU-8 for mass spectrometry
+	analysis},
+  journal = {J. Micromech. Microeng.},
+  year = {2004},
+  volume = {14},
+  pages = {619\,-\,624},
+  doi = {10.1088/0960-1317/14/4/024},
+  file = {Carlier04.pdf:Photolacke\\Carlier04.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/14/4/024}
+}
+
+@ARTICLE{Carl1977,
+  author = {Carlsson, DJ and Garton, A. and Wiles, DM},
+  title = {The weatherability of polypropylene monofilaments. Effects of fiber
+	production conditions},
+  journal = {Journal of Applied Polymer Science},
+  year = {1977},
+  volume = {21},
+  pages = {2963\,-\,2978},
+  number = {11},
+  doi = {10.1002/app.1977.070211112},
+  file = {:DBD\\Carlsson-PP-oxidation-1977.pdf:PDF},
+  publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
+  url = {http://dx.doi.org/10.1002/app.1977.070211112}
+}
+
+@ARTICLE{Carr1903,
+  author = {W.R. Carr},
+  title = {On the Laws Governing Electric Discharges in Gases at Low Pressures},
+  journal = {Phil. Trans. Roy. Soc. Lond. Math. Phys. Sci.},
+  year = {1903},
+  volume = {201},
+  pages = {403-433},
+  doi = {10.1098/rsta.1903.0020},
+  file = {:DBD\\Carr-Electric dischare at low pressure-1903.pdf:PDF},
+  url = {http://dx.doi.org/10.1098/rsta.1903.0020}
+}
+
+@ARTICLE{Chang00,
+  author = {H.-K. Chang and Y.-K. Kim},
+  title = {{UV-LIGA process for high aspect ratio structure using stress barrier
+	and C-shaped etch hole}},
+  journal = {Sensors and Actuators A},
+  year = {2000},
+  volume = {84},
+  pages = {342\,-\,350},
+  doi = {10.1016/S0924-4247(00)00408-8},
+  file = {SU-8-Aspektverhaeltnis-Springer.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Springer.pdf:PDF},
+  url = {\href{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}}
+}
+
+@ARTICLE{Char1967,
+  author = {F.M. Charbonnier and C.J. Bennette and L.W.~Swanson},
+  title = {Electrical Breakdown between Metal Electrodes in High Vacuum. I.
+	Theory},
+  journal = {J. Appl. Phys.},
+  year = {1967},
+  volume = {38},
+  pages = {627\,-\,633},
+  doi = {10.1063/1.1709385},
+  file = {:DBD\\Charbonnier-Breakdown-1967.pdf:PDF},
+  publisher = {AIP},
+  url = {http://dx.doi.org/10.1063/1.1709385}
+}
+
+@ARTICLE{Char1967-2,
+  author = {F.M. Charbonnier and C.J. Bennette and L.W. Swanson},
+  title = {Electrical Breakdown between Metal Electrodes in High Vacuum. II.
+	Experimental},
+  journal = {J. Appl. Phys.},
+  year = {1967},
+  volume = {38},
+  pages = {634\,-\,640},
+  doi = {10.1063/1.1709386},
+  file = {:DBD\\Charbonnier-Breakdown-1967-2.pdf:PDF},
+  publisher = {AIP},
+  url = {http://dx.doi.org/10.1063/1.1709386}
+}
+
+@ARTICLE{Coog1996,
+  author = {J.J. Coogan and A.D. Sappey},
+  title = {Distribution of {OH} within silent discharge plasma reactors},
+  journal = {IEEE Trans. Plasma Sci.},
+  year = {1996},
+  volume = {24},
+  pages = {91\,-\,92},
+  number = {1},
+  doi = {10.1109/27.491706},
+  file = {:DBD\\Coogan-FilamentDiameter-1996.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/27.491706}
+}
+
+@ARTICLE{Cutl1993,
+  author = {P. Cutler},
+  title = {Theory of electron emission in high fields from atomically sharp
+	emitters: Validity of the Fowler-Nordheim equation},
+  journal = {Progress in Surface Science},
+  year = {1993},
+  volume = {42},
+  pages = {169\,-\,185},
+  number = {1-4},
+  doi = {10.1016/0079-6816(93)90068-7},
+  file = {:DBD\\Cutler-Emission in high fields-1993.pdf:PDF},
+  url = {\href{http://dx.doi.org/10.1016/0079-6816(93)90068-7}{http://dx.doi.org/10.1016/0079-6816(93)90068-7}}
+}
+
+@BOOK{Davi1998,
+  title = {Metals handbook: desk edition},
+  publisher = {ASM International},
+  year = {1998},
+  author = {J.R. Davis},
+  pages = {1128},
+  edition = {2nd}
+}
+
+@ARTICLE{Dikm04,
+  author = {A.J. Dikmans and others},
+  title = {A new compact disc format of high density array synthesis applied
+	to peptide nucleic acids and in situ {MALDI} analysis},
+  journal = {Molecular diversity},
+  year = {2004},
+  volume = {8},
+  pages = {197\,-\,207},
+  number = {3},
+  doi = {10.1023/B:MODI.0000036234.66238.4e},
+  file = {:Allgemein\\Dikmans-Amino-array-2004.pdf:PDF},
+  url = {http://dx.doi.org/10.1023/B:MODI.0000036234.66238.4e}
+}
+
+@PHDTHESIS{Dora02,
+  author = {Rajesh Dorai},
+  title = {Modeling of Atmospheric Pressure Plasma Processing of Gases and Surfaces},
+  school = {University of Illinois at Urbana-Champaign},
+  year = {2002},
+  file = {:DBD\\Dorai-plasma-reactions-2002.pdf:PDF},
+  url = {http://uigelz.eecs.umich.edu/pub/theses/rajesh_phd_thesis.pdf}
+}
+
+@ARTICLE{Dora03,
+  author = {R. Dorai and M.J. Kushner},
+  title = {A model for plasma modification of polypropylene using atmospheric
+	pressure discharges},
+  journal = {J. Phys. D: Appl. Phys},
+  year = {2003},
+  volume = {36},
+  pages = {666\,-\,685},
+  number = {6},
+  doi = {10.1088/0022-3727/36/6/309},
+  file = {:DBD\\Dorai-PP-Surface-chemistry-2003.pdf:PDF},
+  publisher = {IOP PUBLISHING LTD},
+  url = {http://dx.doi.org/10.1088/0022-3727/36/6/309}
+}
+
+@ARTICLE{Dush1923,
+  author = {S. Dushman},
+  title = {Electron Emission from Metals as a Function of Temperature},
+  journal = {Physical Review},
+  year = {1923},
+  volume = {21},
+  pages = {623\,-\,636},
+  doi = {10.1103/PhysRev.21.623},
+  file = {:DBD\\Dushman-Thermionic-Emission-1923.pdf:PDF},
+  publisher = {APS},
+  url = {http://dx.doi.org/10.1103/PhysRev.21.623}
+}
+
+@ARTICLE{Eden03,
+  author = {J.G. Eden and others},
+  title = {Microplasma devices fabricated in silicon, ceramic, and metal/polymer
+	structures: arrays, emitters and photodetectors},
+  journal = {J. Phys. D: Appl. Phys.},
+  year = {2003},
+  volume = {36},
+  pages = {2869\,-\,2877},
+  doi = {10.1088/0022-3727/36/23/001},
+  file = {:DBD\\Eden-Cavity Silicon-2003.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/36/23/001}
+}
+
+@CONFERENCE{Eich05,
+  author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages},
+  title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
+	bei niedrigen Temperaturen}},
+  booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg.
+	Berlin: VDE-Verlag, 2005, pp. 115-118},
+  year = {2005},
+  file = {Waferbonden_Eichler.pdf:DBD\\Waferbonden_Eichler.pdf:PDF},
+  url = {http://www.vde-verlag.de/data/buecher.php?action=bookdetail\&vertriebsnr=562926}
+}
+
+@ARTICLE{Elia1991,
+  author = {B. Eliasson and U. Kogelschatz},
+  title = {Modeling and applications of silent discharge plasmas},
+  journal = {IEEE Trans. Plasma Sci.},
+  year = {1991},
+  volume = {19},
+  pages = {309\,-\,323},
+  number = {2},
+  doi = {10.1109/27.106829},
+  file = {:DBD\\Eliasson-Modelling-1991.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/27.106829}
+}
+
+@ARTICLE{Klei03,
+  author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
+  title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially
+	Swollen Polymer Networks.},
+  journal = {Macromol. Chem. Phys.},
+  year = {2003},
+  volume = {204},
+  pages = {F24\,-\,F25}
+}
+
+@INPROCEEDINGS{Fahl01,
+  author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
+  title = {Deposition of multilayer optical coatings onto plastic webs by pulse
+	magnetron sputtering; challenges and opportunities},
+  booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma
+	Processes (ISSP), p. 189, Kanazawa, Japan},
+  year = {2001},
+  file = {:Allgemein\\Fahrland-Sputtering-2001.pdf:PDF}
+}
+
+@CONFERENCE{Flac02,
+  author = {W.W. Flack and H.A. Nguyen and E. Capsuto},
+  title = {Characterization of a novel photoresist redistribution material for
+	advanced packaging applications},
+  booktitle = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference
+	Series},
+  year = {2002},
+  volume = {4690},
+  pages = {1203\,-\,1216},
+  doi = {10.1117/12.474198},
+  file = {:Photolacke\\SINR-resist-2002.pdf:PDF},
+  url = {http://dx.doi.org/10.1117/12.474198}
+}
+
+@ARTICLE{Forb1999,
+  author = {R.G. Forbes},
+  title = {Refining the application of Fowler-Nordheim theory},
+  journal = {Ultramicroscopy},
+  year = {1999},
+  volume = {79},
+  pages = {11\,-\,23},
+  doi = {10.1016/S0304-3991(99)00097-2},
+  file = {:DBD\\Forbes - Refining the application of Fowler-Nordheim theory.pdf:PDF},
+  url = {http://dx.doi.org/10.1016/S0304-3991(99)00097-2}
+}
+
+@ARTICLE{Fowl1928,
+  author = {R.H. Fowler and L. Nordheim},
+  title = {Electron Emission in Intense Electric Fields},
+  journal = {Proceedings of the Royal Society of London. Series A, Containing
+	Papers of a Mathematical and Physical Character},
+  year = {1928},
+  volume = {119},
+  pages = {173\,-\,181},
+  number = {781},
+  month = {May},
+  file = {:DBD\\Fowler-Nordheim-1928.pdf:PDF},
+  url = {http://www.jstor.org/pss/95023}
+}
+
+@ARTICLE{Gabo1993,
+  author = {S.R. Gaboury and M.W. Urban},
+  title = {Microwave plasma reactions of solid monomers with silicone elastomer
+	surfaces: a spectroscopic study},
+  journal = {Langmuir},
+  year = {1993},
+  volume = {9},
+  pages = {3225\,-\,3233},
+  number = {11},
+  doi = {10.1021/la00035a076},
+  file = {:DBD\\Gaboury-Epoxy-on-PDMS-1993.pdf:PDF},
+  publisher = {American Chemical Society},
+  url = {http://dx.doi.org/10.1021/la00035a076}
+}
+
+@MISC{GEKA,
+  author = {{GEKA~mbH}},
+  title = {Destroying chemical warfare agents and contaminated military waste},
+  howpublished = {Internet: http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html
+	(accessed 06-09-2009)},
+  owner = {usti},
+  url = {http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html}
+}
+
+@MASTERSTHESIS{Gerb03,
+  author = {M. Gerbracht},
+  title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher
+	Trocknungsverfahren}},
+  school = {Fachhochschule Düsseldorf},
+  year = {2003},
+  type = {Diplomarbeit},
+  file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF}
+}
+
+@INPROCEEDINGS{Golub02-2,
+  author = {Yu.B. Golubovskii and V.A. Maiorov v J. Behnke and J.F. Behnke},
+  title = {Stability of the barrier discharge relative to the filamentation},
+  booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
+	Vol. 1, p. 235-236},
+  year = {2002},
+  file = {Golubovskii02-Filament-stability.pdf:DBD\\Golubovskii02-Filament-stability.pdf:PDF},
+  url = {http://optics.phys.spbu.ru/~golub/articles/barrier2d\_16ESCAMPIG.pdf}
+}
+
+@ARTICLE{Golub03,
+  author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
+  title = {Modelling of the homogeneous barrier discharge in helium at atmospheric
+	pressure},
+  journal = {J. Phys. D: Appl. Phys.},
+  year = {2003},
+  volume = {36},
+  pages = {39\,-\,49},
+  doi = {10.1088/0022-3727/36/1/306},
+  file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/36/1/306}
+}
+
+@INPROCEEDINGS{Golub01,
+  author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
+  title = {The role of emission from the dielectric surface in a homogeneous
+	barrier discharge in nitrogen},
+  booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
+	July 2001) vol VIII p 3239-3244},
+  year = {2001},
+  file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF},
+  url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_ISPC15.pdf}
+}
+
+@MISC{Filament,
+  author = {Yu. B. Golubovskii},
+  howpublished = {Internet:\newline http://optics.phys.spbu.ru/\textasciitilde{}golub/images/filament.jpg
+	(accessed 07-09-2009)},
+  owner = {usti},
+  url = {http://optics.phys.spbu.ru/~golub/images/filament.jpg}
+}
+
+@INPROCEEDINGS{Golub02,
+  author = {Yu. B. Golubovskii and V. A. Maiorov and J. Behnke and J. F. Behnke},
+  title = {Some Aspects of the Modeling of an Uniform Barrier Discharge in Nitrogen},
+  booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
+	Vol. 1, p. 233-234},
+  year = {2002},
+  file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
+  url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf}
+}
+
+@MISC{GolubWeb,
+  author = {Yu. B. Golubovskii and others},
+  title = {Homogeneous barrier discharge},
+  howpublished = {Internet: http://optics.phys.spbu.ru/\textasciitilde{}golub/english/barrier.html},
+  url = {http://optics.phys.spbu.ru/~golub/english/barrier.html}
+}
+
+@ARTICLE{Goos1998,
+  author = {A. Goossens and E.L. Maloney and J Schoonman},
+  title = {Gas-Phase Synthesis of Nanostructured Anatase $\mathrm{TiO_2}$},
+  journal = {Chemical Vapor Deposition},
+  year = {1998},
+  volume = {4},
+  pages = {109\,-\,114},
+  number = {3},
+  doi = {10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U},
+  file = {:DBD\\Goossens-TiCl4-1998.pdf:PDF},
+  publisher = {WILEY-VCH Verlag GmbH Weinheim},
+  url = {\href{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}}
+}
+
+@ARTICLE{Graz08,
+  author = {I. Graz and A. Ebner and S. Bauer and C. Romanin and H. Gruber},
+  title = {Micropatterned atmospheric pressure discharge surface modification
+	of fluorinated polymer films for mammalian cell adhesion and protein
+	binding},
+  journal = {Appl. Phys. A},
+  year = {2008},
+  volume = {92},
+  pages = {547\,-\,555},
+  doi = {10.1007/s00339-008-4614-z},
+  file = {:DBD\\Graz-Patterned surface treatment-2008.pdf:PDF},
+  url = {http://dx.doi.org/10.1007/s00339-008-4614-z}
+}
+
+@ARTICLE{Han04,
+  author = {M. Han and W. Lee and S.-K. Lee and S.S. Lee},
+  title = {{3D microfabrication with inclined/rotated UV lithography}},
+  journal = {Sensors and Actuators A},
+  year = {2003},
+  volume = {111},
+  pages = {14\,-\,20},
+  doi = {10.1016/j.sna.2003.10.006},
+  file = {Rotated UV.pdf:Photolacke\\Rotated UV.pdf:PDF},
+  url = {http://dx.doi.org/10.1016/j.sna.2003.10.006}
+}
+
+@ARTICLE{Hand00,
+  author = {K. Handique and D.T. Burke and C.H. Mastrangelo and M.A. Burns},
+  title = {{Nanoliter liquid metering in microchannels using hydrophobic patterns}},
+  journal = {Anal. Chem.},
+  year = {2000},
+  volume = {72},
+  pages = {4100\,-\,4109},
+  number = {17},
+  doi = {10.1021/ac000064s},
+  file = {:Allgemein\\Handique-hydrophobic-channels-2000.pdf:PDF},
+  url = {http://dx.doi.org/10.1021/ac000064s}
+}
+
+@ARTICLE{Hei04,
+  author = {M. Heise and W. Neff and O. Franken and P. Muranyi and J. Wunderlich},
+  title = {Sterilization of Polymer Foils with Dielectric Barrier Discharges
+	at Atmospheric Pressure},
+  journal = {Plasmas polym.},
+  year = {2004},
+  volume = {9},
+  pages = {23\,-\,33},
+  doi = {10.1023/B:PAPO.0000039814.70172.c0},
+  file = {DBD_Sterilisation_Heise2004.pdf:DBD\\DBD_Sterilisation_Heise2004.pdf:PDF},
+  url = {http://dx.doi.org/10.1023/B:PAPO.0000039814.70172.c0}
+}
+
+@ARTICLE{Hens07,
+  author = {K. Hensel and others},
+  title = {Electrical and Optical Properties of {AC} Microdischarges in Porous
+	Ceramics},
+  journal = {Plasma Process. Polym.},
+  year = {2007},
+  volume = {4},
+  pages = {682\,-\,693},
+  doi = {10.1002/ppap.200700022},
+  file = {:DBD\\Hensel-DBD-in-Ceramics-2007.pdf:PDF},
+  publisher = {WILEY-VCH Verlag Weinheim},
+  url = {http://dx.doi.org/10.1002/ppap.200700022}
+}
+
+@ARTICLE{Heul04,
+  author = {M. Heule and U.P. Schönholzer and L.J. Gauckler},
+  title = {Patterning colloidal suspensions by selective wetting of microcontact-printed
+	surfaces},
+  journal = {J. Eur. Ceram. Soc.},
+  year = {2003},
+  volume = {24},
+  pages = {2733\,-\,2739},
+  doi = {10.1016/j.jeurceramsoc.2003.09.011},
+  file = {:DBD\\Heule2004.pdf:PDF},
+  url = {http://dx.doi.org/10.1016/j.jeurceramsoc.2003.09.011}
+}
+
+@ARTICLE{Heusch1998,
+  author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P.
+	Renaud},
+  title = {Buried microchannels in photopolymer for delivering of solutions
+	to neurons in a network},
+  journal = {Sensors and Actuators B},
+  year = {1998},
+  volume = {48},
+  pages = {356\,-\,361},
+  doi = {10.1016/S0925-4005(98)00071-9},
+  file = {buried microchannels in photopolymer.pdf:Photolacke\\buried microchannels in photopolymer.pdf:PDF},
+  url = {\href{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}}
+}
+
+@ARTICLE{Ho04,
+  author = {K.H. Ho and S.T. Newman and S. Rahimifard and R.D. Allen},
+  title = {State of the art in wire electrical discharge machining {(WEDM)}},
+  journal = {Int. J. Mach. Tool. Manufact.},
+  year = {2004},
+  volume = {44},
+  pages = {1247\,-\,1259},
+  number = {12\,-\,13},
+  doi = {10.1016/j.ijmachtools.2004.04.017},
+  publisher = {Elsevier},
+  url = {http://dx.doi.org/10.1016/j.ijmachtools.2004.04.017}
+}
+
+@ARTICLE{Inag1998,
+  author = {N. Inagaki and S. Tasaka and M. Makino},
+  title = {Plasma polymer deposition from mixture of tetramethoxysilane and
+	oxygen on {PET} films and their oxygen gas barrier properties},
+  journal = {J. Appl. Polym. Sci.},
+  year = {1998},
+  volume = {64},
+  pages = {1031\,-\,1039},
+  number = {6},
+  doi = {10.1002/%28SICI%291097-4628%2819970509%2964%3A6%3C1031%3A%3AAID-APP1%3E3.0.CO%3B2-M},
+  file = {:DBD\\Inagaki-SiOx-oxygen-barrier-1996.pdf:PDF},
+  url = {http://dx.doi.org/10.1002/\%28SICI\%291097-4628\%2819970509\%2964\%3A6\%3C1031\%3A\%3AAID-APP1\%3E3.0.CO\%3B2-M}
+}
+
+@ARTICLE{Ito07,
+  author = {T. Ito and others},
+  title = {Characterization of a microfluidic device fabricated using a photosensitive
+	sheet},
+  journal = {J. Micromech. Microeng.},
+  year = {2007},
+  volume = {17},
+  pages = {432\,-\,438},
+  doi = {10.1088/0960-1317/17/3/003},
+  file = {Ito07.pdf:Photolacke\\Ito07.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/17/3/003}
+}
+
+@ARTICLE{Jack01,
+  author = {R.J. Jackman and T.M. Floyd and R. Ghodssi and M.A. Schmidt and K.F.
+	Jensen},
+  title = {Microfluidic systems with on-line UV detection fabricated in photodefinable
+	epoxy},
+  journal = {J. Micromech. Microeng.},
+  year = {2001},
+  volume = {11},
+  pages = {1\,-\,8},
+  doi = {10.1088/0960-1317/11/3/316},
+  file = {Jack01.pdf:Photolacke\\Jack01.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/11/3/316}
+}
+
+@ARTICLE{Jens03,
+  author = {K.L. Jensen},
+  title = {Electron emission theory and its application: Fowler--Nordheim equation
+	and beyond},
+  journal = {J. Vac. Sci. Technol. B},
+  year = {2003},
+  volume = {21(4)},
+  pages = {1528\,-\,1544},
+  doi = {10.1116/1.1573664},
+  file = {:DBD\\2003_Electron emission theory and its application.pdf:PDF},
+  url = {http://dx.doi.org/10.1116/1.1573664}
+}
+
+@ARTICLE{Jens02,
+  author = {K.L. Jensen},
+  title = {Theory of Field Emission},
+  journal = {Vacuum Microelectronics},
+  year = {2002},
+  volume = {Chapter 3},
+  pages = {33\,-\,104},
+  doi = {10.1002/0471224332.ch3},
+  url = {http://dx.doi.org/10.1002/0471224332.ch3}
+}
+
+@ARTICLE{Jide06,
+  author = {N. Jidenko and M. Petit and J.P. Borra},
+  title = {Electrical characterization of microdischarges produced by dielectric
+	barrier discharge in dry air at atmospheric pressure},
+  journal = {J. Phys. D: Appl. Phys.},
+  year = {2006},
+  volume = {39},
+  pages = {281\,-\,293},
+  number = {2},
+  doi = {10.1088/0022-3727/39/2/008},
+  file = {:DBD\\Jidenko-Plasma-Control-2006.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/39/2/008}
+}
+
+@ARTICLE{Jigu06,
+  author = {S. Jigueta and M. Judelewicza and S. Mischlerb and A. Bertchc and
+	P. Renaudc},
+  title = {Effect of filler behavior on nanocomposite {SU8} photoresist for
+	moving micro-parts},
+  journal = {Microelectron. Eng.},
+  year = {2006},
+  volume = {83},
+  pages = {1273\,-\,1276},
+  doi = {10.1016/j.mee.2006.01.068},
+  file = {Jiguet_SU-8_filler.pdf:Photolacke\\Jiguet_SU-8_filler.pdf:PDF},
+  url = {http://dx.doi.org/10.1016/j.mee.2006.01.068}
+}
+
+@ARTICLE{Kang03,
+  author = {W.S. Kang and J.M. Park and Y. Kim and S.H. Hong},
+  title = {Numerical study on influences of barrier arrangements on dielectric
+	barrier discharge characteristics},
+  journal = {IEEE Trans. Plasma Sci.},
+  year = {2003},
+  volume = {31},
+  pages = {504\,-\,510},
+  number = {4},
+  doi = {10.1109/TPS.2003.815469},
+  file = {:DBD\\Kang-StreamerSimulations-2003.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/TPS.2003.815469}
+}
+
+@ARTICLE{Kawa1969,
+  author = {H. Kawauchi and K. Tuzimura and H. Maeda and N. Ishida},
+  title = {Reaction of fluorescein-isothiocyanate with proteins and amino acids:
+	{II.} Preparation of FIuorescein-Thiohydantoin Amino Acids and Their
+	Thin-layer Chromatography},
+  journal = {Journal of Biochemistry},
+  year = {1969},
+  volume = {66},
+  pages = {783\,-\,789},
+  number = {6},
+  file = {:Allgemein\\Kawauchi-FITC-reaction-1969.pdf:PDF},
+  publisher = {Jpn Biochemical Soc},
+  url = {http://jb.oxfordjournals.org/cgi/content/abstract/66/6/783}
+}
+
+@INPROCEEDINGS{Kien04,
+  author = {J. Kieninger and G. Jobst and G. Igel and I. Moser and G. Urban},
+  title = {{3D} Polymer Microstructures by Laminating {SU-8} Films},
+  booktitle = {{Proceedings of \textmu TAS 2004}},
+  year = {2004},
+  volume = {2},
+  pages = {363\,-\,365},
+  file = {:Photolacke\\Kieninger-Manuscript_microTAS04_SU.-8pdf.pdf:PDF}
+}
+
+@ARTICLE{Kim04,
+  author = {K. Kim and others},
+  title = {{A tapered hollow metallic microneedle array using backside exposure
+	of SU-8}},
+  journal = {J. Micromech. Microeng.},
+  year = {2004},
+  volume = {14},
+  pages = {597\,-\,603},
+  doi = {10.1088/0960-1317/14/4/021},
+  file = {Hollow Needles.pdf:Photolacke\\Hollow Needles.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/14/4/021}
+}
+
+@ARTICLE{Kim03,
+  author = {S.-O. Kim and J.G. Eden},
+  title = {Arrays of Microplasma Devices Fabricated in Photodefinable Glass
+	and Excited {AC or DC} by Interdigitated Electrodes},
+  journal = {IEEE Photonics Technology Letters},
+  year = {2005},
+  volume = {17},
+  pages = {1543\,-\,1545},
+  doi = {10.1109/LPT.2005.848260},
+  file = {:DBD\\Kim-Cavity Array Foturan-2005.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/LPT.2005.848260}
+}
+
+@INPROCEEDINGS{Kim08,
+  author = {Y.K. Kim and D. J. Kim},
+  title = {Deposition of super hydrophobic {a-C:F} films by dielectric barrier
+	discharge at atmospheric pressure},
+  booktitle = {Book of Abstract of 11th International Conference on Plasma Surface
+	Engineering PSE 2008},
+  year = {2008},
+  file = {:DBD\\Kim-CxFy-surface-DBD-2008.pdf:PDF},
+  url = {http://www.pse2008.net/pdf\_edit/tmp/PO1063-PSE2008-2f1418.pdf}
+}
+
+@ARTICLE{Klag07-2,
+  author = {C.P. Klages and C. Berger and M. Eichler and M. Thomas},
+  title = {Microplasma-Based Treatment of Inner Surfaces in Microfluidic Devices},
+  journal = {Contributions to Plasma Physics},
+  year = {2007},
+  volume = {47},
+  pages = {49\,-\,56},
+  doi = {10.1002/ctpp.200710008},
+  file = {:DBD\\Klages-plasmaprinting-channels-2007.pdf:PDF},
+  publisher = {WILEY-VCH Verlag Berlin},
+  url = {http://dx.doi.org/10.1002/ctpp.200710008}
+}
+
+@ARTICLE{Klag00,
+  author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen},
+  title = {Surface functionalization at atmospheric pressure by {DBD}-based
+	pulsed plasma polymerization},
+  journal = {Plasmas and Polymers},
+  year = {2000},
+  volume = {5},
+  pages = {79\,-\,89},
+  number = {2},
+  doi = {10.1023/A:1009583815474},
+  file = {:DBD\\Klages-Epoxy-groups-2000.pdf:PDF},
+  publisher = {Springer},
+  url = {\newline http://dx.doi.org/10.1023/A:1009583815474}
+}
+
+@ARTICLE{Klag07,
+  author = {C.P. Klages and others},
+  title = {Surface Technology with Cold Microplasmas},
+  journal = {Plasma Process. Polym.},
+  year = {2007},
+  volume = {4},
+  pages = {208\,-\,218},
+  number = {3},
+  doi = {10.1002/ppap.200600116},
+  file = {:DBD\\Klages-Overview-07.pdf:PDF},
+  publisher = {John Wiley \& Sons, Ltd},
+  url = {\newline http://dx.doi.org/10.1002/ppap.200600116}
+}
+
+@ARTICLE{Kogel03,
+  author = {U. Kogelschatz},
+  title = {Dielectric-barrier Discharges: Their History, Discharge Physics,
+	and Industrial Applications},
+  journal = {Plasma Chem. Plasma Process.},
+  year = {2003},
+  volume = {23},
+  pages = {1\,-\,46},
+  doi = {10.1023/A:1022470901385},
+  file = {kogelschatz.pdf:DBD\\kogelschatz.pdf:PDF},
+  url = {http://dx.doi.org/10.1023/A:1022470901385}
+}
+
+@ARTICLE{Kogel02,
+  author = {U. Kogelschatz},
+  title = {Filamentary, Patterned, and Diffuse Barrier Discharges},
+  journal = {IEEE Trans. Plasma Sci.},
+  year = {2002},
+  volume = {30},
+  pages = {1400\,-\,1408},
+  number = {4},
+  doi = {10.1109/TPS.2002.804201},
+  file = {:DBD\\Kogelschatz-Filaments-2002.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/TPS.2002.804201}
+}
+
+@ARTICLE{Koid07,
+  author = {T. Koida and H. Fujiwara and M. Kondo},
+  title = {Hydrogen-doped $\mathrm{In_{2}O_{3}}$ as High-mobility Transparent
+	Conductive Oxide},
+  journal = {Jpn. J. Appl. Phys.},
+  year = {2007},
+  volume = {46},
+  pages = {L685\,-\,L687},
+  number = {28},
+  doi = {10.1143/JJAP.46.L685},
+  file = {:Allgemein\\Koida-ITO-2007.pdf:PDF},
+  url = {http://dx.doi.org/10.1143/JJAP.46.L685}
+}
+
+@ARTICLE{Kozl05,
+  author = {K.V. Kozlov and others},
+  title = {Barrier discharges in {N2/O}2 mixtures},
+  journal = {J. Phys. D: Appl. Phys.},
+  year = {2005},
+  volume = {38},
+  pages = {518\,-\,529},
+  doi = {10.1088/0022-3727/38/4/003},
+  file = {:DBD\\Kozlov-oxygen-impurity-2005.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/38/4/003}
+}
+
+@ARTICLE{Krei05,
+  author = {S. Kreitz and C. Penache and M. Thomas and C.-P. Klages},
+  title = {Patterned {DBD} treatment for area-selective metallization of polymers-plasma
+	printing},
+  journal = {Surf. Coat. Technol.},
+  year = {2005},
+  volume = {200},
+  pages = {676\,-\,679},
+  doi = {10.1016/j.surfcoat.2005.01.085},
+  file = {:DBD\\Kreitz05-Patterned DBD treatment.pdf:PDF},
+  url = {http://dx.doi.org/10.1016/j.surfcoat.2005.01.085}
+}
+
+@ARTICLE{Kukh03,
+  author = {E. Kukharenka and M.M. Farooqui and L. Grigore and M. Kraft and N.
+	Hollinshead},
+  title = {Electroplating moulds using dry film thick negative photoresist.},
+  journal = {J. Micromech. Microeng.},
+  year = {2003},
+  volume = {13},
+  pages = {S67\,-\,S74},
+  doi = {10.1088/0960-1317/13/4/311},
+  file = {Ordyl-1.pdf:Photolacke\\Ordyl-1.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/13/4/311}
+}
+
+@ARTICLE{Kunh00,
+  author = {E.E. Kunhardt},
+  title = {Generation of Large-Volume, Atmospheric-Pressure, Nonequilibrium
+	Plasmas},
+  journal = {IEEE Trans. Plasma Sci.},
+  year = {2000},
+  volume = {28},
+  pages = {189\,-\,200},
+  doi = {10.1109/27.842901},
+  file = {:DBD\\Kunhardt00-Frequency-Ignition.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/27.842901}
+}
+
+@ARTICLE{Kwak03,
+  author = {M.G. Kwak and others},
+  title = {Improvement of Luminance Efficiency in Xenon Dielectric Barrier Discharge
+	Flat Lamp},
+  journal = {IEEE Trans. Plasma Sci.},
+  year = {2003},
+  volume = {31},
+  pages = {176\,-\, 178},
+  doi = {10.1109/TPS.2003.808867},
+  file = {Kwak-Xenon-Lamp-2002.pdf:DBD\\Kwak-Xenon-Lamp-2002.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/TPS.2003.808867}
+}
+
+@ARTICLE{Lang05,
+  author = {B.A. Langowski and K.E. Uhrich},
+  title = {Microscale Plasma-Initiated Patterning (\textmu {PIP})},
+  journal = {Langmuir},
+  year = {2005},
+  volume = {21},
+  pages = {10509\,-\,10514},
+  doi = {10.1021/la052222m},
+  file = {:DBD\\Langowski-PDMS plasma patterning-2005.pdf:PDF},
+  url = {\newline http://dx.doi.org/10.1021/la052222m}
+}
+
+@UNPUBLISHED{Lede08,
+  author = {L. Ledernez and F. Olcaytug and G. Urban and H. Yasuda},
+  title = {Influence of the Electrode Material on the Electrical Breakdown of
+	Argon},
+  note = {accepted for Plasma Sources Science and Technology}
+}
+
+@ARTICLE{Leve1944,
+  author = {K. Levenberg},
+  title = {A method for the solution of certain non-linear problems in least
+	squares},
+  journal = {Q. Appl. Math},
+  year = {1944},
+  volume = {2},
+  pages = {164\,-\,168},
+  number = {2}
+}
+
+@ARTICLE{Lu08,
+  author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
+  title = {Low temperature plasma channels generated in microcavity trenches
+	with widths of 20\,-\,150\,\textmu{}m and aspect ratios as large
+	as 10\textsuperscript{4}\,:\,1},
+  journal = {Appl. Phys. Lett.},
+  year = {2008},
+  volume = {92},
+  pages = {1397\,-\,1402},
+  doi = {10.1063/1.2827197},
+  file = {:DBD\\Lu-Plasma channels-2008.pdf:PDF},
+  url = {http://dx.doi.org/10.1063/1.2827197}
+}
+
+@ARTICLE{Lu07,
+  author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
+  title = {Microcavity Plasma Devices and Arrays Fabricated by Plastic-Based
+	Replica Molding},
+  journal = {J. Microelectromech. Syst.},
+  year = {2007},
+  volume = {16},
+  pages = {1397\,-\,1402},
+  doi = {10.1109/JMEMS.2006.886034},
+  file = {:DBD\\Lu-Microcavities by molding-2007.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/JMEMS.2006.886034}
+}
+
+@PHDTHESIS{Luca09,
+  author = {N. Lucas},
+  title = {Microplasma Stamps - An Atmospheric-Pressure Plasma Source for the
+	Area-Selective Modification of Surfaces},
+  school = {Institute for Microtechnology, TU Braunschweig},
+  year = {2009},
+  url = {http://www.shaker.de/Online-Gesamtkatalog/details.asp?ID=8983398&CC=3631&ISBN=3-8322-8008-1}
+}
+
+@ARTICLE{Luca08-2,
+  author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach},
+  title = {Microplasma stamps for selective surface modification: design and
+	characterization},
+  journal = {J. Phys. D: Appl. Phys.},
+  year = {2008},
+  volume = {41},
+  pages = {215202 (7pp)},
+  doi = {10.1088/0022-3727/41/21/215202},
+  file = {:DBD\\Lucas-PDMS-Stamps-2.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/41/21/215202}
+}
+
+@ARTICLE{Luca08-1,
+  author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach},
+  title = {Design and optimization of dielectric barrier discharge microplasma
+	stamps},
+  journal = {J. Phys. D: Appl. Phys.},
+  year = {2008},
+  volume = {41},
+  pages = {194012 (5pp)},
+  doi = {10.1088/0022-3727/41/19/194012},
+  file = {:DBD\\Lucas-PDMS-Stamps-1.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/41/19/194012}
+}
+
+@ARTICLE{Malk08,
+  author = {G.S. Malkov and others},
+  title = {Pulsed-Plasma-Induced Micropatterning with Alternating Hydrophilic
+	and Hydrophobic Surface Chemistries},
+  journal = {Plasma Process. Polym.},
+  year = {2008},
+  volume = {5},
+  pages = {129\,-\,145},
+  number = {2},
+  doi = {10.1002/ppap.200700118},
+  file = {:DBD\\Malkov-SEM mask pattern-2008.pdf:PDF},
+  publisher = {John Wiley \& Sons, Ltd},
+  url = {http://dx.doi.org/10.1002/ppap.200700118}
+}
+
+@ARTICLE{Marq1963,
+  author = {Donald W. Marquardt},
+  title = {An Algorithm for Least-Squares Estimation of Nonlinear Parameters},
+  journal = {SIAM Journal on Applied Mathematics},
+  year = {1963},
+  volume = {11},
+  pages = {431\,-\,441},
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+  doi = {10.1137/0111030},
+  publisher = {SIAM},
+  url = {http://dx.doi.org/10.1137\%2F0111030}
+}
+
+@ARTICLE{Mart04,
+  author = {C.R. Martin and I.A. Aksay},
+  title = {Submicrometer-scale patterning of ceramic thin films},
+  journal = {J. of Electroceramics},
+  year = {2004},
+  volume = {12},
+  pages = {53\,-\,68},
+  number = {1},
+  doi = {10.1023/B:JECR.0000034001.15359.98},
+  file = {:Allgemein\\Martin-Patterning-Ceramics-Overview-2004.pdf:PDF},
+  publisher = {Springer},
+  url = {http://dx.doi.org/10.1023/B:JECR.0000034001.15359.98}
+}
+
+@ARTICLE{Mart1997,
+  author = {C. Martinet and V. Paillard and A. Gagnaire and J. Joseph},
+  title = {Deposition of $\mathrm{SiO_2}$ and $\mathrm{TiO_2}$ thin films by
+	plasma enhanced chemical vapor deposition for antireflection coating},
+  journal = {J. Non-Cryst. Solids},
+  year = {1997},
+  volume = {216},
+  pages = {77\,-\,82},
+  doi = {10.1016/S0022-3093(97)00175-0},
+  file = {:DBD\\Martinet-SiO2-TiO2-1997.pdf:PDF},
+  url = {\href{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}}
+}
+
+@ARTICLE{Mass01,
+  author = {F. Massines and others},
+  title = {The role of dielectric barrier discharge atmosphere and physics on
+	polypropylene surface treatment},
+  journal = {Plasmas and Polymers},
+  year = {2001},
+  volume = {6},
+  pages = {35\,-\,49},
+  number = {1},
+  doi = {10.1023/A:1011365306501},
+  file = {:DBD\\Massines-oxygen-impurities-2001.pdf:PDF},
+  url = {http://dx.doi.org/10.1023/A:1011365306501}
+}
+
+@ARTICLE{Masu1998,
+  author = {T. Masuzawa and T. Takawashi},
+  title = {{Recent trends in EDM/ECM technologies in Japan}},
+  journal = {VDI BERICHTE},
+  year = {1998},
+  volume = {1405},
+  pages = {1\,-\,16},
+  publisher = {VDI VERLAG GMBH}
+}
+
+@ARTICLE{Mata06,
+  author = {A. Mata and A.J. Fleischmann and S. Roy},
+  title = {Fabrication of multi-layer {SU-8} microstructures},
+  journal = {J. Micromech. Microeng.},
+  year = {2006},
+  volume = {16},
+  pages = {276\,-\,284},
+  doi = {10.1088/0960-1317/16/2/012},
+  file = {SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/16/2/012}
+}
+
+@ARTICLE{Melz1996,
+  author = {K.A. Melzak and C.S. Sherwood and R.F.B. Turner and C.A. Haynes},
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+  volume = {181},
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+  doi = {10.1006/jcis.1996.0421},
+  file = {:Allgemein\\Melzak-DNA-SiOx-Adsorption-1996.pdf:PDF},
+  publisher = {Elsevier},
+  url = {\newline http://dx.doi.org/10.1006/jcis.1996.0421}
+}
+
+@CONFERENCE{Menz02,
+  author = {W. Menz and R. Förster and A. Schoth and C. Müller},
+  title = {Non-conventional machining for microsystems},
+  booktitle = {Proc. 3rd Euspen Int. Conf.},
+  year = {2002},
+  pages = {37}
+}
+
+@ARTICLE{Mira00,
+  author = {S.F. Miralaï and others},
+  title = {Electrical and Optical Diagnostics of Dielectric Barrier Discharges
+	{(DBD) in He and N2} for Polymer Treatment},
+  journal = {Plasmas and Polymers},
+  year = {2000},
+  volume = {5},
+  pages = {63\,-\,77},
+  number = {2},
+  doi = {10.1023/A:1009531831404},
+  file = {:DBD\\Miralai-oxygen-impurity-2000.pdf:PDF},
+  url = {http://dx.doi.org/10.1023/A:1009531831404}
+}
+
+@INPROCEEDINGS{TOK06,
+  author = {K. Misumi and others},
+  title = {Faster sensitivity and non-antimonite permanent photoresist for {MEMS}},
+  booktitle = {Advances in Resist Technology and Processing XXIII},
+  year = {2006},
+  editor = {Qinghuang Lin},
+  volume = {6153},
+  series = {Proceedings of SPIE},
+  pages = {61534F},
+  organization = {SPIE},
+  doi = {10.1117/12.656249},
+  file = {TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:Photolacke\\TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:PDF},
+  url = {http://dx.doi.org/10.1117/12.656249}
+}
+
+@ARTICLE{TOK06-2,
+  author = {K. Misumi and K. Saito and A. Yamanouchi and T. Senzaki and H. Honma},
+  title = {Minute Tunnel Structure Formation with Permanent Film Photoresist},
+  journal = {J. Photopolym. Sci. Technol.},
+  year = {2006},
+  volume = {19},
+  pages = {57\,-\,62},
+  doi = {10.2494/photopolymer.19.57},
+  file = {TOK-Minute tunnel structure formation with permanent film photoresist.pdf:Photolacke\\TOK-Minute tunnel structure formation with permanent film photoresist.pdf:PDF},
+  url = {\newline http://dx.doi.org/10.2494/photopolymer.19.57}
+}
+
+@ARTICLE{Mull1988,
+  author = {W.M. Mullins and B.L. Averbach},
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+  journal = {Surface Science},
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+  volume = {206},
+  pages = {41\,-\,51},
+  number = {1-2},
+  doi = {10.1016/0039-6028(88)90013-1},
+  file = {:DBD\\Mullins-Work function of AluOxide-1988.pdf:PDF},
+  publisher = {Elsevier},
+  url = {\href{http://dx.doi.org/10.1016/0039-6028(88)90013-1}{http://dx.doi.org/10.1016/0039-6028(88)90013-1}}
+}
+
+@ARTICLE{Murp1956,
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+  file = {:DBD\\Murphy,Good - Thermionic Emission, Field Emission, and the Transition Region.pdf:PDF},
+  url = {http://dx.doi.org/10.1103/PhysRev.102.1464}
+}
+
+@ARTICLE{Muel1999,
+  author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P.
+	Boeuf},
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+  journal = {IEEE Trans. Plasma Sci.},
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+  pages = {20\,-\,21},
+  doi = {10.1109/27.763004},
+  file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/27.763004}
+}
+
+@ARTICLE{Naka01,
+  author = {A. Nakajima and K. Hashimoto and T. Watanabe},
+  title = {Recent studies on super-hydrophobic films},
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+  volume = {132},
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+  file = {:Allgemein\\TiO2-hydrophobic-Nakajima-2001.pdf:PDF},
+  publisher = {Springer},
+  url = {http://dx.doi.org/10.1007/s007060170142}
+}
+
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+  file = {:DBD\\Niemeyer 95 generalized approach partial discharges.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/94.407017}
+}
+
+@ARTICLE{Noes04,
+  author = {M. Noeske and J. Degenhardt and S. Strudthoff and U. Lommatzsch},
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+	modifications and the relevance for adhesion},
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+  file = {:DBD\\Noeske03-plasma jet treatment.pdf:PDF},
+  url = {http://dx.doi.org/10.1016/j.ijadhadh.2003.09.006}
+}
+
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+  pages = {833\,-\,855},
+  number = {11\,-\,12},
+  month = {November},
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+  file = {:DBD\\Nordheim-1928.pdf:PDF},
+  url = {http://dx.doi.org/10.1007/BF01391020}
+}
+
+@CONFERENCE{Nuss09,
+  author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten},
+  title = {Micromixing Structures for Lab-on Chip Applications: Fabrication
+	and Simulation of 90° Zigzag Microchann els in Dry Film Resist},
+  booktitle = {4M\,/\,ICOMM 2009 Conference},
+  year = {2009},
+  pages = {215\,-\,218},
+  doi = {10.1243/17547164C0012009041},
+  file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF},
+  owner = {usti},
+  url = {http://dx.doi.org/10.1243/17547164C0012009041}
+}
+
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+  author = {J. O'Brien},
+  title = {Advanced photoresist technologies for microsystems},
+  journal = {J. Micromech. Microeng.},
+  year = {2001},
+  volume = {11},
+  pages = {353\,-\,358},
+  doi = {10.1088/0960-1317/11/4/312},
+  file = {OBrien01.pdf:Photolacke\\OBrien01.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/11/4/312}
+}
+
+@ARTICLE{Ohl1999,
+  author = {A. Ohl and K. Schröder},
+  title = {Plasma-induced chemical micropatterning for cell culturing applications:
+	a brief review},
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+  year = {1999},
+  volume = {116},
+  pages = {820\,-\,830},
+  doi = {10.1016/S0257-8972(99)00150-4},
+  file = {:DBD\\Ohl-SEM grid pattern-1999.pdf:PDF},
+  publisher = {Elsevier},
+  url = {\href{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}}
+}
+
+@PHDTHESIS{Olss1998,
+  author = {Anders Olsson},
+  title = {Valve-less Diffuser Micropumps},
+  school = {School of Electrical Engineering, Royal Institute of Technology,
+	Stockholm, Sweden},
+  year = {1998},
+  file = {:Allgemein\\1998 Valve-less diffuser micropumps.pdf:PDF},
+  url = {http://www.s3.kth.se/instrlab/research/dissertations/pdf/andersodoc.pdf}
+}
+
+@ARTICLE{Pan02,
+  author = {C.-T. Pan and H. Yang and S.-C. Shen and M.-C. Chou and H.-P. Chou},
+  title = {A low-temperature wafer bonding technique using patternable materials},
+  journal = {J. Micromech. Microeng.},
+  year = {2002},
+  volume = {12},
+  pages = {611\,-\,615},
+  doi = {10.1088/0960-1317/12/5/315},
+  file = {Wafer-Bonding-Pan.pdf:Photolacke\\Wafer-Bonding-Pan.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/12/5/315}
+}
+
+@ARTICLE{Park01,
+  author = {J. Park and I. Henins and H.W. Herrmann and G.S. Selwyn},
+  title = {Discharge phenomena of an atmospheric pressure radio-frequency capacitive
+	plasma source},
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+  year = {2001},
+  volume = {89},
+  pages = {20\,-\,28},
+  doi = {10.1063/1.1323753},
+  file = {:DBD\\Park01-Discharge phenomena.pdf:PDF},
+  url = {http://dx.doi.org/10.1063/1.1323753}
+}
+
+@ARTICLE{Park05,
+  author = {S.-J. Park and K.S. Kim and J.G. Eden},
+  title = {Nanoporous alumina as a dielectric for microcavity plasma devices:
+	Multilayer {Al/AlO} structures},
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+  volume = {86},
+  pages = {221501},
+  doi = {10.1063/1.1923747},
+  file = {:DBD\\Park-Cavitiy Al2O3-2005.pdf:PDF},
+  publisher = {AIP},
+  url = {http://dx.doi.org/10.1063/1.1923747}
+}
+
+@ARTICLE{Pasc1889,
+  author = {F. Paschen},
+  title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure
+	bei verschiedenen Drucken erforderliche Potentialdifferenz}},
+  journal = {Annalen der Physik},
+  year = {1889},
+  volume = {273},
+  pages = {69\,-\,96},
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+  file = {:DBD\\Paschen-1889.pdf:PDF},
+  url = {http://dx.doi.org/10.1002/andp.18892730505}
+}
+
+@ARTICLE{Payn02,
+  author = {W.G. Payne and B.W. James and I.S. Falconer},
+  title = {The Growth and Decay of Miniature Dielectric Barrier Discharges in
+	Helium, Neon, and Argon},
+  journal = {IEEE Trans. Plasma Sci.},
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+  volume = {30},
+  pages = {170\,-\,171},
+  doi = {10.1109/TPS.2002.1003978},
+  file = {Payne-Discharge-Growth-2002.pdf:DBD\\Payne-Discharge-Growth-2002.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/TPS.2002.1003978}
+}
+
+@MISC{PCI,
+  author = {{PCI-SIG}},
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+  howpublished = {Internet:\newline http://www.pcisig.com/specifications/conventional
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+}
+
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+  booktitle = {Proceedings. 2nd VDE World Microtechnologies Congress, October 13
+	- 15, 2003},
+  doi = {10.1049/ip-nbt:20040836},
+  file = {:DBD\\Penache04-Printing.pdf:PDF},
+  url = {http://dx.doi.org/10.1049/ip-nbt:20040836}
+}
+
+@ARTICLE{Phel1999,
+  author = {A.V. Phelps and Z.Lj. Petrovic},
+  title = {Cold-cathode discharges and breakdown in argon: surface and gas phase
+	production of secondary electrons},
+  journal = {Plasma Sources Sci. Technol.},
+  year = {1999},
+  volume = {8},
+  pages = {21\,-\,44},
+  doi = {10.1088/0963-0252/8/3/201},
+  file = {:DBD\\Phelps-Petrovic-Secondary-emission-1999.pdf:PDF},
+  publisher = {IOP PUBLISHING},
+  url = {http://dx.doi.org/10.1088/0963-0252/8/3/201}
+}
+
+@INPROCEEDINGS{Rada07,
+  author = {A.D. Radadia and L. Cao and H.-K. Jeong and M.A. Shannon and R.I.
+	Masel},
+  title = {A {3D} Micromoxer Fabricated with Dry Film Resist},
+  booktitle = {Proc. of MEMS 2007},
+  year = {2007},
+  pages = {361\,-\,364},
+  doi = {10.1109/MEMSYS.2007.4433110},
+  file = {:Photolacke\\Radadia-3D micromixer-2007.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/MEMSYS.2007.4433110}
+}
+
+@ARTICLE{Radm07,
+  author = {M. Radmilovic-Radjenovic and Z.L. Petrovic and B. Radjenovic},
+  title = {Modelling of breakdown behavior by {PIC/MCC} code with improved secondary
+	emission models},
+  journal = {J. Phys.: Conf. Ser.},
+  year = {2007},
+  volume = {71},
+  pages = {012007},
+  number = {1},
+  booktitle = {Journal of Physics: Conference Series},
+  doi = {10.1088/1742-6596/71/1/012007},
+  file = {:DBD\\Radjenovic-secondary-emisson-2007.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/1742-6596/71/1/012007}
+}
+
+@ARTICLE{Radu03,
+  author = {I. Radu and R. Bartnikas and G. Czeremuszkin and M.R. Wertheimer},
+  title = {Diagnostics of Dielectric Barrier Discharges in Noble Gases: Atmospheric
+	Pressure Glow and Pseudoglow Discharges and Spatio-Temporal Patterns},
+  journal = {IEEE Trans. Plasma Sci.},
+  year = {2003},
+  volume = {31},
+  pages = {411\,-\,421},
+  number = {3},
+  doi = {10.1109/TPS.2003.811647},
+  file = {:DBD\\Radu-filament-noble-gases-2003.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/TPS.2003.811647}
+}
+
+@ARTICLE{Radu05,
+  author = {I. Radu and R. Bartnikas and M.R. Wertheimer},
+  title = {Diagnostics and modelling of noble gas atmospheric pressure dielectric
+	barrier discharges in homogeneous or diverging electric fields},
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+  file = {Radu-filament-noble-gases-2005.pdf:DBD\\Radu-filament-noble-gases-2005.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/38/4/005}
+}
+
+@ARTICLE{Rao05,
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+  title = {Microfabricated deposition nozzles for direct-write assembly of three-dimensional
+	periodic structures},
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+  year = {2005},
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+  doi = {10.1002/adma.200400514},
+  file = {:Allgemein\\Rao-3D-ink-hexagonal-2005.pdf:PDF},
+  publisher = {Wiley-VCH Verlag GmbH},
+  url = {http://dx.doi.org/10.1002/adma.200400514}
+}
+
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+  title = {The Emission of Electricity from Hot Bodies},
+  publisher = {Longmans, Green and co.},
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+  url = {http://www.worldcat.org/wcpa/oclc/946804}
+}
+
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+  file = {:DBD\\Sarra-Bournet-treatment-time-2006.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/39/16/S03}
+}
+
+@ARTICLE{Sawa1995,
+  author = {Y. Sawada and S. Ogawa and M. Kogoma},
+  title = {Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane
+	films prepared by atmospheric pressure glow discharge},
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+  volume = {28},
+  pages = {1661\,-\,1661},
+  doi = {10.1088/0022-3727/28/8/015},
+  file = {:DBD\\Sawada-TEOS-SiOx-1995.pdf:PDF},
+  publisher = {IOP PUBLISHING LTD},
+  url = {http://dx.doi.org/10.1088/0022-3727/28/8/015}
+}
+
+@ARTICLE{Sche07,
+  author = {A. Schenk and others},
+  title = {Microstructured Electrode Arrays: Optical analysis of the Glow Discharge
+	in a Magnified Electrode Gap},
+  journal = {Plasma Process. Polym.},
+  year = {2007},
+  volume = {4},
+  pages = {S927\,-\,S930},
+  doi = {10.1002/ppap.200732301},
+  file = {:DBD\\Schenk-Optical-Analysis.pdf:PDF},
+  url = {http://dx.doi.org/10.1002/ppap.200732301}
+}
+
+@ARTICLE{Scho04,
+  author = {K.H. Schoenbach and M. Moselhy and W. Shi},
+  title = {Self-organization in cathode boundary layer microdischarges},
+  journal = {Plasma Sources Sci. Technol.},
+  year = {2004},
+  volume = {13},
+  pages = {177\,-\,185},
+  number = {1},
+  doi = {10.1088/0963-0252/13/1/023},
+  file = {:DBD\\Schoenbach-FilamentDiameter-2004.pdf:PDF},
+  publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
+	c1991-},
+  url = {http://dx.doi.org/10.1088/0963-0252/13/1/023}
+}
+
+@ARTICLE{Scho1999,
+  author = {U.P Schönholzer and L.J. Gauckler},
+  title = {Ceramic parts patterned in the micrometer range},
+  journal = {Adv. Mater.},
+  year = {1999},
+  volume = {11},
+  pages = {630\,-\,632},
+  number = {8},
+  file = {:Allgemein\\Schoenholzer-KeramikStrukturiertSintern1-1999.pdf:PDF},
+  publisher = {WILEY-VCH Verlag GmbH Weinheim},
+  url = {\href{http://www.cheric.org/research/tech/periodicals/doi.php?art_seq=646499}{http://www.cheric.org/research/tech/periodicals/doi.php?art\_seq=\newline 646499}}
+}
+
+@ARTICLE{Smit00,
+  author = {R.C. Smith and others},
+  title = {Chemical vapour deposition of the oxides of titanium, zirconium and
+	hafnium for use as high-k materials in microelectronic devices. A
+	carbon-free precursor for the synthesis of hafnium dioxide},
+  journal = {Adv. Mater. Opt. and Electron.},
+  year = {2000},
+  volume = {10},
+  pages = {105\,-\,114},
+  number = {3-5},
+  doi = {10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J},
+  file = {:DBD\\Smith-Ti-and-others-2000.pdf:PDF},
+  publisher = {John Wiley \& Sons, Ltd. Chichester, UK},
+  url = {\href{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}}
+}
+
+@BOOK{Socr1994,
+  title = {Infrared and Raman characteristic group frequencies: tables and charts},
+  publisher = {John Wiley \& Sons},
+  year = {1994},
+  author = {G. Socrates},
+  edition = {2nd}
+}
+
+@MISC{Lightning,
+  author = {J. R. Southern},
+  title = {Toronto thunderstorm},
+  howpublished = {Internet: \newline http://en.wikipedia.org/wiki/File:Krunkwerke\_-\_IMG\_4515\_\%28by-sa\%29.jpg
+	(accessed 07-09-2009)},
+  url = {http://en.wikipedia.org/wiki/File:Krunkwerke_-_IMG_4515_%28by-sa%29.jpg}
+}
+
+@CONFERENCE{Stal07,
+  author = {O. Stalter and B. Burger and S. Lehrmann},
+  title = {{Silicon Carbide (SiC) D-MOS for grid-feeding solar-inverters}},
+  booktitle = {European Conference on Power Electronics and Applications, 2007},
+  year = {2007},
+  pages = {1\,-\,10},
+  doi = {10.1109/EPE.2007.4417654},
+  file = {:Allgemein\\Stalter-SiC-Inverters-2007.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/EPE.2007.4417654}
+}
+
+@ARTICLE{Star06,
+  author = {S.M. Starikovskaia},
+  title = {Plasma assisted ignition and combustion},
+  journal = {J. Phys. D: Appl. Phys.},
+  year = {2006},
+  volume = {39},
+  pages = {R265\,-\,R299},
+  number = {16},
+  doi = {10.1088/0022-3727/39/16/R01},
+  file = {:DBD\\Starikovskaia-Streamer-overview-2006.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0022-3727/39/16/R01}
+}
+
+@ARTICLE{Step07,
+  author = {K. Stephan and others},
+  title = {Fast prototyping using a dry film photoresist: microfabrication of
+	soft-lithography masters for microfluidic structures},
+  journal = {J. Micromech. Microeng.},
+  year = {2007},
+  volume = {17},
+  pages = {N69\,-\,N74},
+  doi = {10.1088/0960-1317/17/10/N01},
+  file = {:Photolacke\\Stephan-DFR-Etertec-HQ-2007.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/17/10/N01}
+}
+
+@ARTICLE{Stoe10,
+  author = {U. Stöhr and others},
+  title = {Porous photoresist stamps for selective plasma treatment},
+  journal = {Plasma Processes Polym.},
+  year = {2010},
+  volume = {7},
+  pages = {9\,-\,15},
+  number = {1},
+  doi = {10.1002/ppap.200900063},
+  file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF},
+  url = {\newline http://dx.doi.org/10.1002/ppap.200900063}
+}
+
+@ARTICLE{Stoe09,
+  author = {Uwe Stöhr and others},
+  title = {Multilayer Photoresist Stamps for Selective Plasma Treatment in Micrometer
+	Scales},
+  journal = {Plasma Process. Polym.},
+  year = {2009},
+  volume = {6},
+  pages = {228\,-\,233},
+  number = {4},
+  doi = {10.1002/ppap.200800217},
+  file = {:DBD\\PlasmaPaper-Photoresist-finally-printed.pdf:PDF},
+  url = {http://dx.doi.org/10.1002/ppap.200800217}
+}
+
+@ARTICLE{Stoe08,
+  author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke},
+  title = {High-resolution permanent photoresist laminate for microsystem applications},
+  journal = {J. Micro/Nanolith. MEMS MOEMS},
+  year = {2008},
+  volume = {7},
+  pages = {033009},
+  doi = {10.1117/1.2964217},
+  file = {:Photolacke\\TMMFPaperSPIE-2Draft.pdf:PDF},
+  url = {http://dx.doi.org/10.1117/1.2964217}
+}
+
+@ARTICLE{Suk07,
+  author = {J.W. Suk and J. Cho},
+  title = {Capillary flow control using hydrophobic patterns},
+  journal = {J. Micromech. Microeng.},
+  year = {2007},
+  volume = {17},
+  pages = {N11\,-\,N15},
+  number = {4},
+  doi = {10.1088/0960-1317/17/4/N01},
+  file = {:Allgemein\\Suk-hydrophobic-channels-2007.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/17/4/N01}
+}
+
+@ARTICLE{Tan06,
+  author = {H.M.L. Tan and T. Akagi and T. Ichiki},
+  title = {Localized Plasma Treatment of Poly(dimethylsiloxane) Surfaces and
+	Its Application to Controlled Cell Cultivation},
+  journal = {J. Photopolym. Sci. Technol.},
+  year = {2006},
+  volume = {19},
+  pages = {245\,-\,250},
+  doi = {10.2494/photopolymer.19.245},
+  file = {:DBD\\Tan06-Plasmajet.pdf:PDF},
+  url = {http://dx.doi.org/10.2494/photopolymer.19.245}
+}
+
+@MISC{LyX,
+  author = {{The LyX Team}},
+  title = {LyX 1.6.x},
+  howpublished = {Internet: http://www.lyx.org},
+  url = {http://www.lyx.org}
+}
+
+@ARTICLE{Ther03,
+  author = {D. Therriault and S.R. White and J.A. Lewis},
+  title = {Chaotic mixing in three-dimensional microvascular networks fabricated
+	by direct-write assembly},
+  journal = {Nature Materials},
+  year = {2003},
+  volume = {2},
+  pages = {265\,-\,271},
+  number = {4},
+  doi = {10.1038/nmat863},
+  file = {:Allgemein\\Therriault-Ink-Channels-2003.pdf:PDF},
+  publisher = {Nature Publishing Group},
+  url = {http://dx.doi.org/10.1038/nmat863}
+}
+
+@INPROCEEDINGS{Thom06,
+  author = {M. Thomas and M. Eichler and C.-P. Klages},
+  title = {Coating with Atmospheric Pressure Plasma Processes: From Large Area
+	to \textmu{}-Structures},
+  booktitle = {49th Annual Technical Conference Proceedings},
+  year = {2006},
+  organization = {Society of Vacuum Coaters},
+  url = {http://tinyurl.com/Thomas06}
+}
+
+@ARTICLE{Thom07,
+  author = {M. Thomas and M. von Hausen and C.-P. Klages and P. Baumhof},
+  title = {Generation of Stable Coatings with Carboxylic Groups by Copolymerization
+	of {MAA} and {VTMS} using {DBD} at Atmospheric Pressure},
+  journal = {Plasma Process. Polym.},
+  year = {2007},
+  volume = {4},
+  pages = {S475\,-\,S481},
+  doi = {10.1002/ppap.200731210},
+  file = {:DBD\\Thomas-Carboxy-groups-2007.pdf:PDF},
+  publisher = {WILEY-VCH Verlag Weinheim},
+  url = {http://dx.doi.org/10.1002/ppap.200731210}
+}
+
+@BOOK{Town1915,
+  title = {Electricity in Gases},
+  publisher = {Clarendon Press},
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+  author = {J.S. Townsend},
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+}
+
+@BOOK{Town1910,
+  title = {The Theory of Ionization of Gases by Collision},
+  publisher = {Constable},
+  year = {1910},
+  author = {J.S. Townsend},
+  url = {http://www.worldcat.org/wcpa/oclc/8460026}
+}
+
+@ARTICLE{Tsai06-2,
+  author = {Y.-C. Tsai and H.-P. Jen and K.-W. Lin and Y.-Z. Hsie},
+  title = {Fabrication of microfluidic devices using dry film photoresist for
+	microchip capillary electrophoresis},
+  journal = {J. Chromatogr. A},
+  year = {2006},
+  volume = {1111},
+  pages = {267\,-\,271},
+  doi = {0.1016/j.chroma.2005.12.003},
+  file = {AF-5000-Photolack-2.pdf:Photolacke\\AF-5000-Photolack-2.pdf:PDF},
+  url = {http://dx.doi.org/10.1016/j.chroma.2005.12.003}
+}
+
+@ARTICLE{Tsai06-1,
+  author = {Y.-C. Tsai and S.-J. Yang and H.-T. Lee and H.-P. Jen and Y.-Z. Hsieh},
+  title = {Fabrication of a Flexible and Disposable Microreactor Using a Dry
+	Film Photoresist},
+  journal = {J. Chin. Chem. Soc.},
+  year = {2006},
+  volume = {53},
+  pages = {683\,-\,688},
+  file = {AF-5000-Photolack.pdf:Photolacke\\AF-5000-Photolack.pdf:PDF},
+  url = {http://nr.stpi.org.tw/ejournal/ChiChemSociety/2006/EJ52-2006-683.pdf}
+}
+
+@ARTICLE{Uden1972,
+  author = {S. Udenfriend and others},
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+	and Primary Amines in the Picomole Range},
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+  file = {:Allgemein\\Udenfriend-Fluorescamine-1972.pdf:PDF},
+  url = {http://dx.doi.org/10.1126/science.178.4063.871}
+}
+
+@ARTICLE{Velt05,
+  author = {T. Velten and others},
+  title = {Packaging of Bio-MEMS: Strategies, Technologies, and Applications},
+  journal = {IEEE trans. adv. packag.},
+  year = {2005},
+  volume = {28},
+  pages = {533\,-\,546},
+  doi = {10.1109/TADVP.2005.858427},
+  file = {Velten05-review.pdf:Photolacke\\Velten05-review.pdf:PDF},
+  url = {http://dx.doi.org/10.1109/TADVP.2005.858427}
+}
+
+@ARTICLE{Vora05,
+  author = {K.D. Vora and B.Y. Shew and E.C. Harvey and J.P. Hayes and A.G. Peele},
+  title = {{Specification of mechanical support structures to prevent SU-8 stiction
+	in high aspect ratio structures}},
+  journal = {J. Micromech. Microeng.},
+  year = {2005},
+  volume = {15},
+  pages = {978\,-\,983},
+  doi = {10.1088/0960-1317/15/5/012},
+  file = {SU-8-Aspektverhaeltnis-jmm2005.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm2005.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/15/5/012}
+}
+
+@CONFERENCE{Vult07,
+  author = {P. Vulto and G. Igel and G.A. Urban},
+  title = {Full wafer fabrication process for microfluidic glass chips with
+	electroplated electrodes},
+  booktitle = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
+	TRANSDUCERS 2007.},
+  year = {2007},
+  pages = {117\,-\,120},
+  doi = {10.1109/SENSOR.2007.4300085},
+  file = {:Photolacke\\Vult07.pdf:PDF},
+  journal = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
+	TRANSDUCERS 2007.},
+  url = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=4300085}
+}
+
+@INPROCEEDINGS{Vult06-2,
+  author = {P. Vulto and C. Klaunick and G. Igel and G. Urban},
+  title = {{tmRNA} purification by electrophoretic filtration for genomic identification
+	of bacteria on-a-chip},
+  booktitle = {Proceedings of \textmu{}TAS 2006},
+  year = {2006},
+  volume = {2},
+  pages = {377\,-\,379},
+  file = {:Photolacke\\tmRNA purification - MicroTAS2006.pdf:PDF}
+}
+
+@ARTICLE{Vult06,
+  author = {P. Vulto and others},
+  title = {Selective sample recovery of DEP-separated cells and particles by
+	phaseguide-controlled laminar flow},
+  journal = {J. Micromech. Microeng.},
+  year = {2006},
+  volume = {16},
+  pages = {1847\,-\,1853},
+  doi = {10.1088/0960-1317/16/9/013},
+  file = {Vult06.pdf:Photolacke\\Vult06.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/0960-1317/16/9/013}
+}
+
+@ARTICLE{Vult05,
+  author = {P. Vulto and others},
+  title = {Microfluidic channel fabrication in dry film resist for production
+	and prototyping of hybrid chips},
+  journal = {Lab on a Chip},
+  year = {2005},
+  volume = {5},
+  pages = {158\,-\,162},
+  doi = {10.1039/b411885e},
+  file = {Vulto-Ordyl.pdf:Photolacke\\Vulto-Ordyl.pdf:PDF},
+  url = {http://dx.doi.org/10.1039/b411885e}
+}
+
+@ARTICLE{Wang06,
+  author = {C. Wang and X. He},
+  title = {Polypropylene surface modification model in atmospheric pressure
+	dielectric barrier discharge},
+  journal = {Surface \& Coatings Technology},
+  year = {2006},
+  volume = {201},
+  pages = {3377\,-\,3384},
+  number = {6},
+  doi = {10.1016/j.surfcoat.2006.07.205},
+  file = {:DBD\\Wang-PP-Contact-Angle-2006.pdf:PDF},
+  publisher = {Elsevier},
+  url = {http://dx.doi.org/10.1016/j.surfcoat.2006.07.205}
+}
+
+@CONFERENCE{Wash05,
+  author = {Y. Washio and others},
+  title = {Multilayer ultra thick resist development for {MEMS}},
+  booktitle = {Proceedings of SPIE},
+  year = {2005},
+  volume = {5753},
+  pages = {959},
+  doi = {10.1117/12.600227},
+  url = {http://dx.doi.org/10.1117/12.600227}
+}
+
+@ARTICLE{Will04,
+  author = {J.D. Williams and W. Wang},
+  title = {Microfabrication of an electromagnetic power relay using {SU-8 based
+	UV-LIGA} technology},
+  journal = {Microsystem Technologies},
+  year = {2004},
+  volume = {10},
+  pages = {699\,-\,705},
+  doi = {10.1007/s00542-004-0396-1},
+  file = {SU-8-Aspektverhaeltnis-2.pdf:Photolacke\\SU-8-Aspektverhaeltnis-2.pdf:PDF},
+  url = {http://dx.doi.org/10.1007/s00542-004-0396-1}
+}
+
+@ARTICLE{Xu07,
+  author = {X. Xu and L. Li and S. Wang and L. Zhao and T. Ye},
+  title = {Deposition of $\mathrm{SiO_x}$ films with a capacitively-coupled
+	plasma at atmospheric pressure},
+  journal = {Plasma Sources Sci. Technol.},
+  year = {2007},
+  volume = {16},
+  pages = {372\,-\,376},
+  number = {2},
+  doi = {10.1088/0963-0252/16/2/021},
+  file = {:DBD\\Xu-SiOx-DBD-2007.pdf:PDF},
+  publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
+	c1991-},
+  url = {http://dx.doi.org/10.1088/0963-0252/16/2/021}
+}
+
+@ARTICLE{Yama1996,
+  author = {K. Yamada and T. Haraguchi and T. Kajiyama},
+  title = {Plasma-graft polymerization of vinyl monomers with reactive groups
+	onto a surface of poly (p-phenylene terephthalamide) fiber},
+  journal = {J. Appl. Polym. Sci.},
+  year = {1996},
+  volume = {60},
+  pages = {1847\,-\,1853},
+  number = {11},
+  doi = {10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L},
+  file = {:DBD\\Yamada-epoxy-grafting-1996.pdf:PDF},
+  publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
+  url = {\href{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}}
+}
+
+@BOOK{Yasu05,
+  title = {Luminous Chemical Vapor Deposition and Interface Engineering},
+  publisher = {Marcel Dekker},
+  year = {2005},
+  editor = {Arthur T. Hubbard},
+  author = {Hirotsugu Yasuda},
+  volume = {122},
+  series = {Surfactant Science Series},
+  edition = {1st}
+}
+
+@ARTICLE{Yu06,
+  author = {L. Yu and others},
+  title = {Adhesive bonding with SU-8 at wafer level for microfluidic devices},
+  journal = {J. Phys.: Conf. Ser.},
+  year = {2006},
+  volume = {34},
+  pages = {776\,-\,781},
+  doi = {10.1088/1742-6596/34/1/128},
+  file = {Yu06.pdf:Photolacke\\Yu06.pdf:PDF},
+  url = {http://dx.doi.org/10.1088/1742-6596/34/1/128}
+}
+
+@ARTICLE{Zhan04,
+  author = {J. Zhang and M.B. Chan-Park and S.R. Conner},
+  title = {Effect of exposure dose on the replication fidelity and profile of
+	very high aspect ratio microchannels in {SU-8}},
+  journal = {Lab on a Chip},
+  year = {2004},
+  volume = {4},
+  pages = {646\,-\,653},
+  doi = {10.1039/b403304c},
+  file = {SU-8-Aspektverhaeltnis-Theorie.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Theorie.pdf:PDF},
+  url = {http://dx.doi.org/10.1039/b403304c}
+}
+
+@ARTICLE{Zhan1995,
+  author = {J. Zhang. and K. Kato and Y. Uyama and Y. Ikada},
+  title = {Surface graft polymerization of glycidyl methacrylate onto polyethylene
+	and the adhesion with epoxy resin},
+  journal = {J. Polymer Sci. Polymer Chem.},
+  year = {1995},
+  volume = {33},
+  pages = {2629\,-\,2638},
+  number = {15},
+  doi = {10.1002/pola.1995.080331509},
+  file = {:DBD\\Zhang-epoxy-grafting-PE-1995.pdf:PDF},
+  publisher = {John Wiley \& Sons, Inc. New York},
+  url = {http://dx.doi.org/10.1002/pola.1995.080331509}
+}
+
+@ARTICLE{Zhao1999,
+  author = {Y. Zhao and M.-W. Urban},
+  title = {Spectroscopic studies of microwave plasma reactions of maleic anhydride
+	on poly (vinylidene fluoride) surfaces: crystallinity and surface
+	reactions},
+  journal = {Langmuir},
+  year = {1999},
+  volume = {15},
+  pages = {3538\,-\,3544},
+  number = {10},
+  doi = {10.1021/la981310m},
+  file = {:DBD\\Zhao-Carboxy-on-PVDF-1999.pdf:PDF},
+  url = {http://dx.doi.org/10.1021/la981310m}
+}
+
+@ARTICLE{Zou01,
+  author = {X.P. Zou and E.T. Kang and K.G. Neoh and C.Q. Cui and T.B. Lim},
+  title = {Surface modification of poly (tetrafluoroethylene) films by plasma
+	polymerization of glycidyl methacrylate for adhesion enhancement
+	with evaporated copper},
+  journal = {Polymer},
+  year = {2001},
+  volume = {42},
+  pages = {6409\,-\,6418},
+  number = {15},
+  doi = {10.1016/S0032-3861(01)00113-6},
+  file = {:DBD\\Zou-epoxy-2001.pdf:PDF},
+  publisher = {Elsevier},
+  url = {\href{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}}
+}
+
+@BOOK{CRC07,
+  title = {CRC Handbook of Chemistry and Physics},
+  publisher = {Taylor and Francis},
+  year = {2007},
+  editor = {David R. Lide},
+  pages = {12-114},
+  edition = {87th},
+  file = {:DBD\\CRC-Work functions-2007.pdf:PDF},
+  url = {http:/www.hbcpnetbase.com}
+}
+
+@STANDARD{ASTME1294,
+  title = {{ASTM}~E~1294-89~(1999), Standard Test Method for Pore Size Characteristics
+	of Membrane Filters Using Automated Liquid Porosimeter},
+  organization = {ASTM International},
+  url = {http://www.astm.org/DATABASE.CART/WITHDRAWN/E1294.htm}
+}
+
+@STANDARD{ISO10780,
+  title = {{ISO}~10780:1994, Stationary source emissions -- Measurement of velocity
+	and volume flowrate of gas streams in ducts},
+  organization = {ISO},
+  url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=18855}
+}
+
+@STANDARD{ISO4003,
+  title = {{ISO}~4003:1977, Permeable sintered metal materials -- Determination
+	of bubble test pore size},
+  organization = {ISO},
+  url = {\newline http://www.iso.org/iso/catalogue\_detail.htm?csnumber=9678}
+}
+
+@STANDARD{ISO4287,
+  title = {{ISO}~4287~(1997), Geometrical Product Specifications Surface Texture
+	Profile Method Terms, Definitions and Surface Texture Parameters},
+  organization = {ISO},
+  url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=10132}
+}
+