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authorAnton Luka Å ijanec <anton@sijanec.eu>2023-02-27 00:15:03 +0100
committerAnton Luka Å ijanec <anton@sijanec.eu>2023-02-27 00:15:03 +0100
commit3fed51e23753255ffc6e660aaacf926e8ac735e7 (patch)
treedd815583d778fe36343d1843d30d4fb0d61d41e1 /inf/rn/dok/lyx/thesisExample.bib
parentinf rn lyx (diff)
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+% This file was created with JabRef 2.5.
+% Encoding: Cp1252
+
+@ARTICLE{Abgr07,
+ author = {P. Abgrall and A.-M. Gué},
+ title = {Lab-on-chip technologies: making a microfluidic network and coupling
+ it into a complete microsystem---a review},
+ journal = {J. Micromech. Microeng.},
+ year = {2007},
+ volume = {17},
+ pages = {R15\,-\,R49},
+ doi = {10.1088/0960-1317/17/5/R01},
+ file = {Abgrall07-Review.pdf:Photolacke\\Abgrall07-Review.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/17/5/R01}
+}
+
+@ARTICLE{Abgr06,
+ author = {P. Abgrall and others},
+ title = {A novel fabrication method of flexible and monolithic {3D microfluidic
+ structures using lamination of SU-8} films},
+ journal = {J. Micromech. Microeng.},
+ year = {2006},
+ volume = {16},
+ pages = {113\,-\,121},
+ doi = {10.1088/0960-1317/16/1/016},
+ file = {SU-8-selbst-hergestellt.pdf:Photolacke\\SU-8-selbst-hergestellt.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/16/1/016}
+}
+
+@ARTICLE{Abol05,
+ author = {S.N. Abolmasov and T. Shirafuji and K. Tachibana},
+ title = {Submillimeter Dielectric Barrier Discharges at Atmospheric Pressure:
+ Edge Effect},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {2005},
+ volume = {33},
+ pages = {941\,-\,948},
+ doi = {10.1109/TPS.2005.845093},
+ file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF},
+ review = {Priorität 1
+
+ Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
+ url = {http://dx.doi.org/10.1109/TPS.2005.845093}
+}
+
+@ARTICLE{Akis03,
+ author = {Yu.S. Akishev and A.V. Dem\textrm{'}yanov and V.B. Karal\textrm{'}nik
+ and A.E. Monich and N.I. Trushkin},
+ title = {Comparison of the AC Barrier Corona with DC Positive and Negative
+ Coronas and Barrier Discharge},
+ journal = {Plasma Physics Reports},
+ year = {2003},
+ volume = {29},
+ pages = {90\,-\,100},
+ doi = {10.1134/1.1538505},
+ file = {Akishev-Comparison-BC-dischages-2003.pdf:DBD\\Akishev-Comparison-BC-dischages-2003.pdf:PDF},
+ url = {http://www.triniti.ru/CTF\&VM/Articles/Demyanov3.pdf}
+}
+
+@ARTICLE{Baba01,
+ author = {S.E. Babayan and others},
+ title = {Deposition of silicon dioxide films with a non-equilibrium atmospheric-pressure
+ plasma jet},
+ journal = {Plasma Sources Sci. Technol.},
+ year = {2001},
+ volume = {10},
+ pages = {573\,-\,578},
+ number = {4},
+ doi = {10.1088/0963-0252/10/4/305},
+ file = {:DBD\\Babayan-SiOx-2001.pdf:PDF},
+ publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
+ c1991-},
+ url = {http://dx.doi.org/10.1088/0963-0252/10/4/305}
+}
+
+@ARTICLE{Beck06,
+ author = {K.H. Becker and K.H. Schoenbach and J.G. Eden},
+ title = {Microplasmas and applications},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2006},
+ volume = {39},
+ pages = {R55\,-\,R70},
+ doi = {10.1088/0022-3727/39/3/R01},
+ file = {:DBD\\Becker_Overview microplasmas-2006.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/39/3/R01}
+}
+
+@ARTICLE{Bile04,
+ author = {B. Bilenberg and T. Nielsen and B. Clausen and A. Kristensen},
+ title = {PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with
+ integrated optics},
+ journal = {J. Micromech. Microeng.},
+ year = {2004},
+ volume = {14},
+ pages = {814\,-\,818},
+ doi = {10.1088/0960-1317/14/6/008},
+ file = {Bile04.pdf:Photolacke\\Bile04.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/14/6/008}
+}
+
+@ARTICLE{Blan04,
+ author = {F. J. Blanco and others},
+ title = {Novel three-dimensional embedded {SU-8} microchannels fabricated
+ using a low temperature full wafer adhesive bonding},
+ journal = {J. Micromech. Microeng.},
+ year = {2004},
+ volume = {14},
+ pages = {1047\,-\,1056},
+ doi = {10.1088/0960-1317/14/7/027},
+ file = {Blan04.pdf:Photolacke\\Blan04.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/14/7/027}
+}
+
+@ARTICLE{Boga02,
+ author = {A. Bogaerts and E. Neyts and R. Gijbels and J. van der Mullen},
+ title = {Gas discharge plasmas and their applications},
+ journal = {Spectrochim. Acta. B Atom. Spectros.},
+ year = {2002},
+ volume = {57},
+ pages = {609--658},
+ number = {4},
+ doi = {10.1016/S0584-8547(01)00406-2},
+ file = {:Allgemein\\2002_gas discharge plasmas and their applications.pdf:PDF},
+ publisher = {Elsevier},
+ url = {\href{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}}
+}
+
+@BOOK{Bohl1989,
+ title = {Technische Strömungslehre},
+ publisher = {Vogel-Verlag, Würzburg},
+ year = {1989},
+ author = {Willi Bohl},
+ edition = {8th},
+ url = {http://www.worldcat.org/oclc/315749265}
+}
+
+@ARTICLE{Bran07,
+ author = {R. Brandenburg and others},
+ title = {Antimicrobial Treatment of Heat Sensitive Materials by Means of Atmospheric
+ Pressure {Rf}-Driven Plasma Jet},
+ journal = {Contrib. Plasma Phys.},
+ year = {2007},
+ volume = {47},
+ pages = {72\,-\,79},
+ doi = {10.1002/ctpp.200710011},
+ file = {:DBD\\Brandenburg07-PlasmaJet-microbial.pdf:PDF},
+ url = {http://dx.doi.org/10.1002/ctpp.200710011}
+}
+
+@ARTICLE{Bran05,
+ author = {R. Brandenburg and H.-E. Wagner and A.M. Morozov and K.V. Kozlov},
+ title = {Axial and radial development of microdischarges of barrier discharges
+ in {N2/O2} mixtures at atmospheric pressure},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2005},
+ volume = {38},
+ pages = {1649\,-\,1657},
+ number = {11},
+ doi = {10.1088/0022-3727/38/11/003},
+ file = {:DBD\\Brandenburg-DBD-characteristics-05.pdf:PDF},
+ publisher = {London: The Institute of Physics and The Physical Society.},
+ url = {http://dx.doi.org/10.1088/0022-3727/38/11/003}
+}
+
+@CONFERENCE{Brea09,
+ author = {M.C. Breadmore and E. Candish and R.M. Guijt},
+ title = {Dry film photoresist, saving time and money without compromising
+ on performance},
+ booktitle = {\textmu TAS 2009},
+ year = {2009}
+}
+
+@BOOK{Bruu08,
+ title = {Theoretical Microfluidics},
+ publisher = {Oxford University Press},
+ year = {2008},
+ author = {Henrik Bruus},
+ url = {http://www.worldcat.org/oclc/176807166}
+}
+
+@ARTICLE{Bull01,
+ author = {N.A. Bullett and others},
+ title = {Direct imaging of plasma-polymerized chemical micropatterns},
+ journal = {Surf. Interface Anal.},
+ year = {2001},
+ volume = {31},
+ pages = {1074\,-\,1076},
+ number = {11},
+ doi = {10.1002/sia.1146},
+ file = {:DBD\\Bullett-SEM mask pattern-2001.pdf:PDF},
+ url = {http://dx.doi.org/10.1002/sia.1146}
+}
+
+@ARTICLE{Carl04,
+ author = {J. Carlier and others},
+ title = {Integrated microfluidics based on multi-layered SU-8 for mass spectrometry
+ analysis},
+ journal = {J. Micromech. Microeng.},
+ year = {2004},
+ volume = {14},
+ pages = {619\,-\,624},
+ doi = {10.1088/0960-1317/14/4/024},
+ file = {Carlier04.pdf:Photolacke\\Carlier04.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/14/4/024}
+}
+
+@ARTICLE{Carl1977,
+ author = {Carlsson, DJ and Garton, A. and Wiles, DM},
+ title = {The weatherability of polypropylene monofilaments. Effects of fiber
+ production conditions},
+ journal = {Journal of Applied Polymer Science},
+ year = {1977},
+ volume = {21},
+ pages = {2963\,-\,2978},
+ number = {11},
+ doi = {10.1002/app.1977.070211112},
+ file = {:DBD\\Carlsson-PP-oxidation-1977.pdf:PDF},
+ publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
+ url = {http://dx.doi.org/10.1002/app.1977.070211112}
+}
+
+@ARTICLE{Carr1903,
+ author = {W.R. Carr},
+ title = {On the Laws Governing Electric Discharges in Gases at Low Pressures},
+ journal = {Phil. Trans. Roy. Soc. Lond. Math. Phys. Sci.},
+ year = {1903},
+ volume = {201},
+ pages = {403-433},
+ doi = {10.1098/rsta.1903.0020},
+ file = {:DBD\\Carr-Electric dischare at low pressure-1903.pdf:PDF},
+ url = {http://dx.doi.org/10.1098/rsta.1903.0020}
+}
+
+@ARTICLE{Chang00,
+ author = {H.-K. Chang and Y.-K. Kim},
+ title = {{UV-LIGA process for high aspect ratio structure using stress barrier
+ and C-shaped etch hole}},
+ journal = {Sensors and Actuators A},
+ year = {2000},
+ volume = {84},
+ pages = {342\,-\,350},
+ doi = {10.1016/S0924-4247(00)00408-8},
+ file = {SU-8-Aspektverhaeltnis-Springer.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Springer.pdf:PDF},
+ url = {\href{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}}
+}
+
+@ARTICLE{Char1967,
+ author = {F.M. Charbonnier and C.J. Bennette and L.W.~Swanson},
+ title = {Electrical Breakdown between Metal Electrodes in High Vacuum. I.
+ Theory},
+ journal = {J. Appl. Phys.},
+ year = {1967},
+ volume = {38},
+ pages = {627\,-\,633},
+ doi = {10.1063/1.1709385},
+ file = {:DBD\\Charbonnier-Breakdown-1967.pdf:PDF},
+ publisher = {AIP},
+ url = {http://dx.doi.org/10.1063/1.1709385}
+}
+
+@ARTICLE{Char1967-2,
+ author = {F.M. Charbonnier and C.J. Bennette and L.W. Swanson},
+ title = {Electrical Breakdown between Metal Electrodes in High Vacuum. II.
+ Experimental},
+ journal = {J. Appl. Phys.},
+ year = {1967},
+ volume = {38},
+ pages = {634\,-\,640},
+ doi = {10.1063/1.1709386},
+ file = {:DBD\\Charbonnier-Breakdown-1967-2.pdf:PDF},
+ publisher = {AIP},
+ url = {http://dx.doi.org/10.1063/1.1709386}
+}
+
+@ARTICLE{Coog1996,
+ author = {J.J. Coogan and A.D. Sappey},
+ title = {Distribution of {OH} within silent discharge plasma reactors},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {1996},
+ volume = {24},
+ pages = {91\,-\,92},
+ number = {1},
+ doi = {10.1109/27.491706},
+ file = {:DBD\\Coogan-FilamentDiameter-1996.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/27.491706}
+}
+
+@ARTICLE{Cutl1993,
+ author = {P. Cutler},
+ title = {Theory of electron emission in high fields from atomically sharp
+ emitters: Validity of the Fowler-Nordheim equation},
+ journal = {Progress in Surface Science},
+ year = {1993},
+ volume = {42},
+ pages = {169\,-\,185},
+ number = {1-4},
+ doi = {10.1016/0079-6816(93)90068-7},
+ file = {:DBD\\Cutler-Emission in high fields-1993.pdf:PDF},
+ url = {\href{http://dx.doi.org/10.1016/0079-6816(93)90068-7}{http://dx.doi.org/10.1016/0079-6816(93)90068-7}}
+}
+
+@BOOK{Davi1998,
+ title = {Metals handbook: desk edition},
+ publisher = {ASM International},
+ year = {1998},
+ author = {J.R. Davis},
+ pages = {1128},
+ edition = {2nd}
+}
+
+@ARTICLE{Dikm04,
+ author = {A.J. Dikmans and others},
+ title = {A new compact disc format of high density array synthesis applied
+ to peptide nucleic acids and in situ {MALDI} analysis},
+ journal = {Molecular diversity},
+ year = {2004},
+ volume = {8},
+ pages = {197\,-\,207},
+ number = {3},
+ doi = {10.1023/B:MODI.0000036234.66238.4e},
+ file = {:Allgemein\\Dikmans-Amino-array-2004.pdf:PDF},
+ url = {http://dx.doi.org/10.1023/B:MODI.0000036234.66238.4e}
+}
+
+@PHDTHESIS{Dora02,
+ author = {Rajesh Dorai},
+ title = {Modeling of Atmospheric Pressure Plasma Processing of Gases and Surfaces},
+ school = {University of Illinois at Urbana-Champaign},
+ year = {2002},
+ file = {:DBD\\Dorai-plasma-reactions-2002.pdf:PDF},
+ url = {http://uigelz.eecs.umich.edu/pub/theses/rajesh_phd_thesis.pdf}
+}
+
+@ARTICLE{Dora03,
+ author = {R. Dorai and M.J. Kushner},
+ title = {A model for plasma modification of polypropylene using atmospheric
+ pressure discharges},
+ journal = {J. Phys. D: Appl. Phys},
+ year = {2003},
+ volume = {36},
+ pages = {666\,-\,685},
+ number = {6},
+ doi = {10.1088/0022-3727/36/6/309},
+ file = {:DBD\\Dorai-PP-Surface-chemistry-2003.pdf:PDF},
+ publisher = {IOP PUBLISHING LTD},
+ url = {http://dx.doi.org/10.1088/0022-3727/36/6/309}
+}
+
+@ARTICLE{Dush1923,
+ author = {S. Dushman},
+ title = {Electron Emission from Metals as a Function of Temperature},
+ journal = {Physical Review},
+ year = {1923},
+ volume = {21},
+ pages = {623\,-\,636},
+ doi = {10.1103/PhysRev.21.623},
+ file = {:DBD\\Dushman-Thermionic-Emission-1923.pdf:PDF},
+ publisher = {APS},
+ url = {http://dx.doi.org/10.1103/PhysRev.21.623}
+}
+
+@ARTICLE{Eden03,
+ author = {J.G. Eden and others},
+ title = {Microplasma devices fabricated in silicon, ceramic, and metal/polymer
+ structures: arrays, emitters and photodetectors},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2003},
+ volume = {36},
+ pages = {2869\,-\,2877},
+ doi = {10.1088/0022-3727/36/23/001},
+ file = {:DBD\\Eden-Cavity Silicon-2003.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/36/23/001}
+}
+
+@CONFERENCE{Eich05,
+ author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages},
+ title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
+ bei niedrigen Temperaturen}},
+ booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg.
+ Berlin: VDE-Verlag, 2005, pp. 115-118},
+ year = {2005},
+ file = {Waferbonden_Eichler.pdf:DBD\\Waferbonden_Eichler.pdf:PDF},
+ url = {http://www.vde-verlag.de/data/buecher.php?action=bookdetail\&vertriebsnr=562926}
+}
+
+@ARTICLE{Elia1991,
+ author = {B. Eliasson and U. Kogelschatz},
+ title = {Modeling and applications of silent discharge plasmas},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {1991},
+ volume = {19},
+ pages = {309\,-\,323},
+ number = {2},
+ doi = {10.1109/27.106829},
+ file = {:DBD\\Eliasson-Modelling-1991.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/27.106829}
+}
+
+@ARTICLE{Klei03,
+ author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
+ title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially
+ Swollen Polymer Networks.},
+ journal = {Macromol. Chem. Phys.},
+ year = {2003},
+ volume = {204},
+ pages = {F24\,-\,F25}
+}
+
+@INPROCEEDINGS{Fahl01,
+ author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
+ title = {Deposition of multilayer optical coatings onto plastic webs by pulse
+ magnetron sputtering; challenges and opportunities},
+ booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma
+ Processes (ISSP), p. 189, Kanazawa, Japan},
+ year = {2001},
+ file = {:Allgemein\\Fahrland-Sputtering-2001.pdf:PDF}
+}
+
+@CONFERENCE{Flac02,
+ author = {W.W. Flack and H.A. Nguyen and E. Capsuto},
+ title = {Characterization of a novel photoresist redistribution material for
+ advanced packaging applications},
+ booktitle = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference
+ Series},
+ year = {2002},
+ volume = {4690},
+ pages = {1203\,-\,1216},
+ doi = {10.1117/12.474198},
+ file = {:Photolacke\\SINR-resist-2002.pdf:PDF},
+ url = {http://dx.doi.org/10.1117/12.474198}
+}
+
+@ARTICLE{Forb1999,
+ author = {R.G. Forbes},
+ title = {Refining the application of Fowler-Nordheim theory},
+ journal = {Ultramicroscopy},
+ year = {1999},
+ volume = {79},
+ pages = {11\,-\,23},
+ doi = {10.1016/S0304-3991(99)00097-2},
+ file = {:DBD\\Forbes - Refining the application of Fowler-Nordheim theory.pdf:PDF},
+ url = {http://dx.doi.org/10.1016/S0304-3991(99)00097-2}
+}
+
+@ARTICLE{Fowl1928,
+ author = {R.H. Fowler and L. Nordheim},
+ title = {Electron Emission in Intense Electric Fields},
+ journal = {Proceedings of the Royal Society of London. Series A, Containing
+ Papers of a Mathematical and Physical Character},
+ year = {1928},
+ volume = {119},
+ pages = {173\,-\,181},
+ number = {781},
+ month = {May},
+ file = {:DBD\\Fowler-Nordheim-1928.pdf:PDF},
+ url = {http://www.jstor.org/pss/95023}
+}
+
+@ARTICLE{Gabo1993,
+ author = {S.R. Gaboury and M.W. Urban},
+ title = {Microwave plasma reactions of solid monomers with silicone elastomer
+ surfaces: a spectroscopic study},
+ journal = {Langmuir},
+ year = {1993},
+ volume = {9},
+ pages = {3225\,-\,3233},
+ number = {11},
+ doi = {10.1021/la00035a076},
+ file = {:DBD\\Gaboury-Epoxy-on-PDMS-1993.pdf:PDF},
+ publisher = {American Chemical Society},
+ url = {http://dx.doi.org/10.1021/la00035a076}
+}
+
+@MISC{GEKA,
+ author = {{GEKA~mbH}},
+ title = {Destroying chemical warfare agents and contaminated military waste},
+ howpublished = {Internet: http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html
+ (accessed 06-09-2009)},
+ owner = {usti},
+ url = {http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html}
+}
+
+@MASTERSTHESIS{Gerb03,
+ author = {M. Gerbracht},
+ title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher
+ Trocknungsverfahren}},
+ school = {Fachhochschule Düsseldorf},
+ year = {2003},
+ type = {Diplomarbeit},
+ file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF}
+}
+
+@INPROCEEDINGS{Golub02-2,
+ author = {Yu.B. Golubovskii and V.A. Maiorov v J. Behnke and J.F. Behnke},
+ title = {Stability of the barrier discharge relative to the filamentation},
+ booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
+ Vol. 1, p. 235-236},
+ year = {2002},
+ file = {Golubovskii02-Filament-stability.pdf:DBD\\Golubovskii02-Filament-stability.pdf:PDF},
+ url = {http://optics.phys.spbu.ru/~golub/articles/barrier2d\_16ESCAMPIG.pdf}
+}
+
+@ARTICLE{Golub03,
+ author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
+ title = {Modelling of the homogeneous barrier discharge in helium at atmospheric
+ pressure},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2003},
+ volume = {36},
+ pages = {39\,-\,49},
+ doi = {10.1088/0022-3727/36/1/306},
+ file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/36/1/306}
+}
+
+@INPROCEEDINGS{Golub01,
+ author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
+ title = {The role of emission from the dielectric surface in a homogeneous
+ barrier discharge in nitrogen},
+ booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
+ July 2001) vol VIII p 3239-3244},
+ year = {2001},
+ file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF},
+ url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_ISPC15.pdf}
+}
+
+@MISC{Filament,
+ author = {Yu. B. Golubovskii},
+ howpublished = {Internet:\newline http://optics.phys.spbu.ru/\textasciitilde{}golub/images/filament.jpg
+ (accessed 07-09-2009)},
+ owner = {usti},
+ url = {http://optics.phys.spbu.ru/~golub/images/filament.jpg}
+}
+
+@INPROCEEDINGS{Golub02,
+ author = {Yu. B. Golubovskii and V. A. Maiorov and J. Behnke and J. F. Behnke},
+ title = {Some Aspects of the Modeling of an Uniform Barrier Discharge in Nitrogen},
+ booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
+ Vol. 1, p. 233-234},
+ year = {2002},
+ file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
+ url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf}
+}
+
+@MISC{GolubWeb,
+ author = {Yu. B. Golubovskii and others},
+ title = {Homogeneous barrier discharge},
+ howpublished = {Internet: http://optics.phys.spbu.ru/\textasciitilde{}golub/english/barrier.html},
+ url = {http://optics.phys.spbu.ru/~golub/english/barrier.html}
+}
+
+@ARTICLE{Goos1998,
+ author = {A. Goossens and E.L. Maloney and J Schoonman},
+ title = {Gas-Phase Synthesis of Nanostructured Anatase $\mathrm{TiO_2}$},
+ journal = {Chemical Vapor Deposition},
+ year = {1998},
+ volume = {4},
+ pages = {109\,-\,114},
+ number = {3},
+ doi = {10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U},
+ file = {:DBD\\Goossens-TiCl4-1998.pdf:PDF},
+ publisher = {WILEY-VCH Verlag GmbH Weinheim},
+ url = {\href{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}}
+}
+
+@ARTICLE{Graz08,
+ author = {I. Graz and A. Ebner and S. Bauer and C. Romanin and H. Gruber},
+ title = {Micropatterned atmospheric pressure discharge surface modification
+ of fluorinated polymer films for mammalian cell adhesion and protein
+ binding},
+ journal = {Appl. Phys. A},
+ year = {2008},
+ volume = {92},
+ pages = {547\,-\,555},
+ doi = {10.1007/s00339-008-4614-z},
+ file = {:DBD\\Graz-Patterned surface treatment-2008.pdf:PDF},
+ url = {http://dx.doi.org/10.1007/s00339-008-4614-z}
+}
+
+@ARTICLE{Han04,
+ author = {M. Han and W. Lee and S.-K. Lee and S.S. Lee},
+ title = {{3D microfabrication with inclined/rotated UV lithography}},
+ journal = {Sensors and Actuators A},
+ year = {2003},
+ volume = {111},
+ pages = {14\,-\,20},
+ doi = {10.1016/j.sna.2003.10.006},
+ file = {Rotated UV.pdf:Photolacke\\Rotated UV.pdf:PDF},
+ url = {http://dx.doi.org/10.1016/j.sna.2003.10.006}
+}
+
+@ARTICLE{Hand00,
+ author = {K. Handique and D.T. Burke and C.H. Mastrangelo and M.A. Burns},
+ title = {{Nanoliter liquid metering in microchannels using hydrophobic patterns}},
+ journal = {Anal. Chem.},
+ year = {2000},
+ volume = {72},
+ pages = {4100\,-\,4109},
+ number = {17},
+ doi = {10.1021/ac000064s},
+ file = {:Allgemein\\Handique-hydrophobic-channels-2000.pdf:PDF},
+ url = {http://dx.doi.org/10.1021/ac000064s}
+}
+
+@ARTICLE{Hei04,
+ author = {M. Heise and W. Neff and O. Franken and P. Muranyi and J. Wunderlich},
+ title = {Sterilization of Polymer Foils with Dielectric Barrier Discharges
+ at Atmospheric Pressure},
+ journal = {Plasmas polym.},
+ year = {2004},
+ volume = {9},
+ pages = {23\,-\,33},
+ doi = {10.1023/B:PAPO.0000039814.70172.c0},
+ file = {DBD_Sterilisation_Heise2004.pdf:DBD\\DBD_Sterilisation_Heise2004.pdf:PDF},
+ url = {http://dx.doi.org/10.1023/B:PAPO.0000039814.70172.c0}
+}
+
+@ARTICLE{Hens07,
+ author = {K. Hensel and others},
+ title = {Electrical and Optical Properties of {AC} Microdischarges in Porous
+ Ceramics},
+ journal = {Plasma Process. Polym.},
+ year = {2007},
+ volume = {4},
+ pages = {682\,-\,693},
+ doi = {10.1002/ppap.200700022},
+ file = {:DBD\\Hensel-DBD-in-Ceramics-2007.pdf:PDF},
+ publisher = {WILEY-VCH Verlag Weinheim},
+ url = {http://dx.doi.org/10.1002/ppap.200700022}
+}
+
+@ARTICLE{Heul04,
+ author = {M. Heule and U.P. Schönholzer and L.J. Gauckler},
+ title = {Patterning colloidal suspensions by selective wetting of microcontact-printed
+ surfaces},
+ journal = {J. Eur. Ceram. Soc.},
+ year = {2003},
+ volume = {24},
+ pages = {2733\,-\,2739},
+ doi = {10.1016/j.jeurceramsoc.2003.09.011},
+ file = {:DBD\\Heule2004.pdf:PDF},
+ url = {http://dx.doi.org/10.1016/j.jeurceramsoc.2003.09.011}
+}
+
+@ARTICLE{Heusch1998,
+ author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P.
+ Renaud},
+ title = {Buried microchannels in photopolymer for delivering of solutions
+ to neurons in a network},
+ journal = {Sensors and Actuators B},
+ year = {1998},
+ volume = {48},
+ pages = {356\,-\,361},
+ doi = {10.1016/S0925-4005(98)00071-9},
+ file = {buried microchannels in photopolymer.pdf:Photolacke\\buried microchannels in photopolymer.pdf:PDF},
+ url = {\href{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}}
+}
+
+@ARTICLE{Ho04,
+ author = {K.H. Ho and S.T. Newman and S. Rahimifard and R.D. Allen},
+ title = {State of the art in wire electrical discharge machining {(WEDM)}},
+ journal = {Int. J. Mach. Tool. Manufact.},
+ year = {2004},
+ volume = {44},
+ pages = {1247\,-\,1259},
+ number = {12\,-\,13},
+ doi = {10.1016/j.ijmachtools.2004.04.017},
+ publisher = {Elsevier},
+ url = {http://dx.doi.org/10.1016/j.ijmachtools.2004.04.017}
+}
+
+@ARTICLE{Inag1998,
+ author = {N. Inagaki and S. Tasaka and M. Makino},
+ title = {Plasma polymer deposition from mixture of tetramethoxysilane and
+ oxygen on {PET} films and their oxygen gas barrier properties},
+ journal = {J. Appl. Polym. Sci.},
+ year = {1998},
+ volume = {64},
+ pages = {1031\,-\,1039},
+ number = {6},
+ doi = {10.1002/%28SICI%291097-4628%2819970509%2964%3A6%3C1031%3A%3AAID-APP1%3E3.0.CO%3B2-M},
+ file = {:DBD\\Inagaki-SiOx-oxygen-barrier-1996.pdf:PDF},
+ url = {http://dx.doi.org/10.1002/\%28SICI\%291097-4628\%2819970509\%2964\%3A6\%3C1031\%3A\%3AAID-APP1\%3E3.0.CO\%3B2-M}
+}
+
+@ARTICLE{Ito07,
+ author = {T. Ito and others},
+ title = {Characterization of a microfluidic device fabricated using a photosensitive
+ sheet},
+ journal = {J. Micromech. Microeng.},
+ year = {2007},
+ volume = {17},
+ pages = {432\,-\,438},
+ doi = {10.1088/0960-1317/17/3/003},
+ file = {Ito07.pdf:Photolacke\\Ito07.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/17/3/003}
+}
+
+@ARTICLE{Jack01,
+ author = {R.J. Jackman and T.M. Floyd and R. Ghodssi and M.A. Schmidt and K.F.
+ Jensen},
+ title = {Microfluidic systems with on-line UV detection fabricated in photodefinable
+ epoxy},
+ journal = {J. Micromech. Microeng.},
+ year = {2001},
+ volume = {11},
+ pages = {1\,-\,8},
+ doi = {10.1088/0960-1317/11/3/316},
+ file = {Jack01.pdf:Photolacke\\Jack01.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/11/3/316}
+}
+
+@ARTICLE{Jens03,
+ author = {K.L. Jensen},
+ title = {Electron emission theory and its application: Fowler--Nordheim equation
+ and beyond},
+ journal = {J. Vac. Sci. Technol. B},
+ year = {2003},
+ volume = {21(4)},
+ pages = {1528\,-\,1544},
+ doi = {10.1116/1.1573664},
+ file = {:DBD\\2003_Electron emission theory and its application.pdf:PDF},
+ url = {http://dx.doi.org/10.1116/1.1573664}
+}
+
+@ARTICLE{Jens02,
+ author = {K.L. Jensen},
+ title = {Theory of Field Emission},
+ journal = {Vacuum Microelectronics},
+ year = {2002},
+ volume = {Chapter 3},
+ pages = {33\,-\,104},
+ doi = {10.1002/0471224332.ch3},
+ url = {http://dx.doi.org/10.1002/0471224332.ch3}
+}
+
+@ARTICLE{Jide06,
+ author = {N. Jidenko and M. Petit and J.P. Borra},
+ title = {Electrical characterization of microdischarges produced by dielectric
+ barrier discharge in dry air at atmospheric pressure},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2006},
+ volume = {39},
+ pages = {281\,-\,293},
+ number = {2},
+ doi = {10.1088/0022-3727/39/2/008},
+ file = {:DBD\\Jidenko-Plasma-Control-2006.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/39/2/008}
+}
+
+@ARTICLE{Jigu06,
+ author = {S. Jigueta and M. Judelewicza and S. Mischlerb and A. Bertchc and
+ P. Renaudc},
+ title = {Effect of filler behavior on nanocomposite {SU8} photoresist for
+ moving micro-parts},
+ journal = {Microelectron. Eng.},
+ year = {2006},
+ volume = {83},
+ pages = {1273\,-\,1276},
+ doi = {10.1016/j.mee.2006.01.068},
+ file = {Jiguet_SU-8_filler.pdf:Photolacke\\Jiguet_SU-8_filler.pdf:PDF},
+ url = {http://dx.doi.org/10.1016/j.mee.2006.01.068}
+}
+
+@ARTICLE{Kang03,
+ author = {W.S. Kang and J.M. Park and Y. Kim and S.H. Hong},
+ title = {Numerical study on influences of barrier arrangements on dielectric
+ barrier discharge characteristics},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {2003},
+ volume = {31},
+ pages = {504\,-\,510},
+ number = {4},
+ doi = {10.1109/TPS.2003.815469},
+ file = {:DBD\\Kang-StreamerSimulations-2003.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/TPS.2003.815469}
+}
+
+@ARTICLE{Kawa1969,
+ author = {H. Kawauchi and K. Tuzimura and H. Maeda and N. Ishida},
+ title = {Reaction of fluorescein-isothiocyanate with proteins and amino acids:
+ {II.} Preparation of FIuorescein-Thiohydantoin Amino Acids and Their
+ Thin-layer Chromatography},
+ journal = {Journal of Biochemistry},
+ year = {1969},
+ volume = {66},
+ pages = {783\,-\,789},
+ number = {6},
+ file = {:Allgemein\\Kawauchi-FITC-reaction-1969.pdf:PDF},
+ publisher = {Jpn Biochemical Soc},
+ url = {http://jb.oxfordjournals.org/cgi/content/abstract/66/6/783}
+}
+
+@INPROCEEDINGS{Kien04,
+ author = {J. Kieninger and G. Jobst and G. Igel and I. Moser and G. Urban},
+ title = {{3D} Polymer Microstructures by Laminating {SU-8} Films},
+ booktitle = {{Proceedings of \textmu TAS 2004}},
+ year = {2004},
+ volume = {2},
+ pages = {363\,-\,365},
+ file = {:Photolacke\\Kieninger-Manuscript_microTAS04_SU.-8pdf.pdf:PDF}
+}
+
+@ARTICLE{Kim04,
+ author = {K. Kim and others},
+ title = {{A tapered hollow metallic microneedle array using backside exposure
+ of SU-8}},
+ journal = {J. Micromech. Microeng.},
+ year = {2004},
+ volume = {14},
+ pages = {597\,-\,603},
+ doi = {10.1088/0960-1317/14/4/021},
+ file = {Hollow Needles.pdf:Photolacke\\Hollow Needles.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/14/4/021}
+}
+
+@ARTICLE{Kim03,
+ author = {S.-O. Kim and J.G. Eden},
+ title = {Arrays of Microplasma Devices Fabricated in Photodefinable Glass
+ and Excited {AC or DC} by Interdigitated Electrodes},
+ journal = {IEEE Photonics Technology Letters},
+ year = {2005},
+ volume = {17},
+ pages = {1543\,-\,1545},
+ doi = {10.1109/LPT.2005.848260},
+ file = {:DBD\\Kim-Cavity Array Foturan-2005.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/LPT.2005.848260}
+}
+
+@INPROCEEDINGS{Kim08,
+ author = {Y.K. Kim and D. J. Kim},
+ title = {Deposition of super hydrophobic {a-C:F} films by dielectric barrier
+ discharge at atmospheric pressure},
+ booktitle = {Book of Abstract of 11th International Conference on Plasma Surface
+ Engineering PSE 2008},
+ year = {2008},
+ file = {:DBD\\Kim-CxFy-surface-DBD-2008.pdf:PDF},
+ url = {http://www.pse2008.net/pdf\_edit/tmp/PO1063-PSE2008-2f1418.pdf}
+}
+
+@ARTICLE{Klag07-2,
+ author = {C.P. Klages and C. Berger and M. Eichler and M. Thomas},
+ title = {Microplasma-Based Treatment of Inner Surfaces in Microfluidic Devices},
+ journal = {Contributions to Plasma Physics},
+ year = {2007},
+ volume = {47},
+ pages = {49\,-\,56},
+ doi = {10.1002/ctpp.200710008},
+ file = {:DBD\\Klages-plasmaprinting-channels-2007.pdf:PDF},
+ publisher = {WILEY-VCH Verlag Berlin},
+ url = {http://dx.doi.org/10.1002/ctpp.200710008}
+}
+
+@ARTICLE{Klag00,
+ author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen},
+ title = {Surface functionalization at atmospheric pressure by {DBD}-based
+ pulsed plasma polymerization},
+ journal = {Plasmas and Polymers},
+ year = {2000},
+ volume = {5},
+ pages = {79\,-\,89},
+ number = {2},
+ doi = {10.1023/A:1009583815474},
+ file = {:DBD\\Klages-Epoxy-groups-2000.pdf:PDF},
+ publisher = {Springer},
+ url = {\newline http://dx.doi.org/10.1023/A:1009583815474}
+}
+
+@ARTICLE{Klag07,
+ author = {C.P. Klages and others},
+ title = {Surface Technology with Cold Microplasmas},
+ journal = {Plasma Process. Polym.},
+ year = {2007},
+ volume = {4},
+ pages = {208\,-\,218},
+ number = {3},
+ doi = {10.1002/ppap.200600116},
+ file = {:DBD\\Klages-Overview-07.pdf:PDF},
+ publisher = {John Wiley \& Sons, Ltd},
+ url = {\newline http://dx.doi.org/10.1002/ppap.200600116}
+}
+
+@ARTICLE{Kogel03,
+ author = {U. Kogelschatz},
+ title = {Dielectric-barrier Discharges: Their History, Discharge Physics,
+ and Industrial Applications},
+ journal = {Plasma Chem. Plasma Process.},
+ year = {2003},
+ volume = {23},
+ pages = {1\,-\,46},
+ doi = {10.1023/A:1022470901385},
+ file = {kogelschatz.pdf:DBD\\kogelschatz.pdf:PDF},
+ url = {http://dx.doi.org/10.1023/A:1022470901385}
+}
+
+@ARTICLE{Kogel02,
+ author = {U. Kogelschatz},
+ title = {Filamentary, Patterned, and Diffuse Barrier Discharges},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {2002},
+ volume = {30},
+ pages = {1400\,-\,1408},
+ number = {4},
+ doi = {10.1109/TPS.2002.804201},
+ file = {:DBD\\Kogelschatz-Filaments-2002.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/TPS.2002.804201}
+}
+
+@ARTICLE{Koid07,
+ author = {T. Koida and H. Fujiwara and M. Kondo},
+ title = {Hydrogen-doped $\mathrm{In_{2}O_{3}}$ as High-mobility Transparent
+ Conductive Oxide},
+ journal = {Jpn. J. Appl. Phys.},
+ year = {2007},
+ volume = {46},
+ pages = {L685\,-\,L687},
+ number = {28},
+ doi = {10.1143/JJAP.46.L685},
+ file = {:Allgemein\\Koida-ITO-2007.pdf:PDF},
+ url = {http://dx.doi.org/10.1143/JJAP.46.L685}
+}
+
+@ARTICLE{Kozl05,
+ author = {K.V. Kozlov and others},
+ title = {Barrier discharges in {N2/O}2 mixtures},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2005},
+ volume = {38},
+ pages = {518\,-\,529},
+ doi = {10.1088/0022-3727/38/4/003},
+ file = {:DBD\\Kozlov-oxygen-impurity-2005.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/38/4/003}
+}
+
+@ARTICLE{Krei05,
+ author = {S. Kreitz and C. Penache and M. Thomas and C.-P. Klages},
+ title = {Patterned {DBD} treatment for area-selective metallization of polymers-plasma
+ printing},
+ journal = {Surf. Coat. Technol.},
+ year = {2005},
+ volume = {200},
+ pages = {676\,-\,679},
+ doi = {10.1016/j.surfcoat.2005.01.085},
+ file = {:DBD\\Kreitz05-Patterned DBD treatment.pdf:PDF},
+ url = {http://dx.doi.org/10.1016/j.surfcoat.2005.01.085}
+}
+
+@ARTICLE{Kukh03,
+ author = {E. Kukharenka and M.M. Farooqui and L. Grigore and M. Kraft and N.
+ Hollinshead},
+ title = {Electroplating moulds using dry film thick negative photoresist.},
+ journal = {J. Micromech. Microeng.},
+ year = {2003},
+ volume = {13},
+ pages = {S67\,-\,S74},
+ doi = {10.1088/0960-1317/13/4/311},
+ file = {Ordyl-1.pdf:Photolacke\\Ordyl-1.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/13/4/311}
+}
+
+@ARTICLE{Kunh00,
+ author = {E.E. Kunhardt},
+ title = {Generation of Large-Volume, Atmospheric-Pressure, Nonequilibrium
+ Plasmas},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {2000},
+ volume = {28},
+ pages = {189\,-\,200},
+ doi = {10.1109/27.842901},
+ file = {:DBD\\Kunhardt00-Frequency-Ignition.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/27.842901}
+}
+
+@ARTICLE{Kwak03,
+ author = {M.G. Kwak and others},
+ title = {Improvement of Luminance Efficiency in Xenon Dielectric Barrier Discharge
+ Flat Lamp},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {2003},
+ volume = {31},
+ pages = {176\,-\, 178},
+ doi = {10.1109/TPS.2003.808867},
+ file = {Kwak-Xenon-Lamp-2002.pdf:DBD\\Kwak-Xenon-Lamp-2002.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/TPS.2003.808867}
+}
+
+@ARTICLE{Lang05,
+ author = {B.A. Langowski and K.E. Uhrich},
+ title = {Microscale Plasma-Initiated Patterning (\textmu {PIP})},
+ journal = {Langmuir},
+ year = {2005},
+ volume = {21},
+ pages = {10509\,-\,10514},
+ doi = {10.1021/la052222m},
+ file = {:DBD\\Langowski-PDMS plasma patterning-2005.pdf:PDF},
+ url = {\newline http://dx.doi.org/10.1021/la052222m}
+}
+
+@UNPUBLISHED{Lede08,
+ author = {L. Ledernez and F. Olcaytug and G. Urban and H. Yasuda},
+ title = {Influence of the Electrode Material on the Electrical Breakdown of
+ Argon},
+ note = {accepted for Plasma Sources Science and Technology}
+}
+
+@ARTICLE{Leve1944,
+ author = {K. Levenberg},
+ title = {A method for the solution of certain non-linear problems in least
+ squares},
+ journal = {Q. Appl. Math},
+ year = {1944},
+ volume = {2},
+ pages = {164\,-\,168},
+ number = {2}
+}
+
+@ARTICLE{Lu08,
+ author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
+ title = {Low temperature plasma channels generated in microcavity trenches
+ with widths of 20\,-\,150\,\textmu{}m and aspect ratios as large
+ as 10\textsuperscript{4}\,:\,1},
+ journal = {Appl. Phys. Lett.},
+ year = {2008},
+ volume = {92},
+ pages = {1397\,-\,1402},
+ doi = {10.1063/1.2827197},
+ file = {:DBD\\Lu-Plasma channels-2008.pdf:PDF},
+ url = {http://dx.doi.org/10.1063/1.2827197}
+}
+
+@ARTICLE{Lu07,
+ author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
+ title = {Microcavity Plasma Devices and Arrays Fabricated by Plastic-Based
+ Replica Molding},
+ journal = {J. Microelectromech. Syst.},
+ year = {2007},
+ volume = {16},
+ pages = {1397\,-\,1402},
+ doi = {10.1109/JMEMS.2006.886034},
+ file = {:DBD\\Lu-Microcavities by molding-2007.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/JMEMS.2006.886034}
+}
+
+@PHDTHESIS{Luca09,
+ author = {N. Lucas},
+ title = {Microplasma Stamps - An Atmospheric-Pressure Plasma Source for the
+ Area-Selective Modification of Surfaces},
+ school = {Institute for Microtechnology, TU Braunschweig},
+ year = {2009},
+ url = {http://www.shaker.de/Online-Gesamtkatalog/details.asp?ID=8983398&CC=3631&ISBN=3-8322-8008-1}
+}
+
+@ARTICLE{Luca08-2,
+ author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach},
+ title = {Microplasma stamps for selective surface modification: design and
+ characterization},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2008},
+ volume = {41},
+ pages = {215202 (7pp)},
+ doi = {10.1088/0022-3727/41/21/215202},
+ file = {:DBD\\Lucas-PDMS-Stamps-2.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/41/21/215202}
+}
+
+@ARTICLE{Luca08-1,
+ author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach},
+ title = {Design and optimization of dielectric barrier discharge microplasma
+ stamps},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2008},
+ volume = {41},
+ pages = {194012 (5pp)},
+ doi = {10.1088/0022-3727/41/19/194012},
+ file = {:DBD\\Lucas-PDMS-Stamps-1.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/41/19/194012}
+}
+
+@ARTICLE{Malk08,
+ author = {G.S. Malkov and others},
+ title = {Pulsed-Plasma-Induced Micropatterning with Alternating Hydrophilic
+ and Hydrophobic Surface Chemistries},
+ journal = {Plasma Process. Polym.},
+ year = {2008},
+ volume = {5},
+ pages = {129\,-\,145},
+ number = {2},
+ doi = {10.1002/ppap.200700118},
+ file = {:DBD\\Malkov-SEM mask pattern-2008.pdf:PDF},
+ publisher = {John Wiley \& Sons, Ltd},
+ url = {http://dx.doi.org/10.1002/ppap.200700118}
+}
+
+@ARTICLE{Marq1963,
+ author = {Donald W. Marquardt},
+ title = {An Algorithm for Least-Squares Estimation of Nonlinear Parameters},
+ journal = {SIAM Journal on Applied Mathematics},
+ year = {1963},
+ volume = {11},
+ pages = {431\,-\,441},
+ number = {2},
+ doi = {10.1137/0111030},
+ publisher = {SIAM},
+ url = {http://dx.doi.org/10.1137\%2F0111030}
+}
+
+@ARTICLE{Mart04,
+ author = {C.R. Martin and I.A. Aksay},
+ title = {Submicrometer-scale patterning of ceramic thin films},
+ journal = {J. of Electroceramics},
+ year = {2004},
+ volume = {12},
+ pages = {53\,-\,68},
+ number = {1},
+ doi = {10.1023/B:JECR.0000034001.15359.98},
+ file = {:Allgemein\\Martin-Patterning-Ceramics-Overview-2004.pdf:PDF},
+ publisher = {Springer},
+ url = {http://dx.doi.org/10.1023/B:JECR.0000034001.15359.98}
+}
+
+@ARTICLE{Mart1997,
+ author = {C. Martinet and V. Paillard and A. Gagnaire and J. Joseph},
+ title = {Deposition of $\mathrm{SiO_2}$ and $\mathrm{TiO_2}$ thin films by
+ plasma enhanced chemical vapor deposition for antireflection coating},
+ journal = {J. Non-Cryst. Solids},
+ year = {1997},
+ volume = {216},
+ pages = {77\,-\,82},
+ doi = {10.1016/S0022-3093(97)00175-0},
+ file = {:DBD\\Martinet-SiO2-TiO2-1997.pdf:PDF},
+ url = {\href{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}}
+}
+
+@ARTICLE{Mass01,
+ author = {F. Massines and others},
+ title = {The role of dielectric barrier discharge atmosphere and physics on
+ polypropylene surface treatment},
+ journal = {Plasmas and Polymers},
+ year = {2001},
+ volume = {6},
+ pages = {35\,-\,49},
+ number = {1},
+ doi = {10.1023/A:1011365306501},
+ file = {:DBD\\Massines-oxygen-impurities-2001.pdf:PDF},
+ url = {http://dx.doi.org/10.1023/A:1011365306501}
+}
+
+@ARTICLE{Masu1998,
+ author = {T. Masuzawa and T. Takawashi},
+ title = {{Recent trends in EDM/ECM technologies in Japan}},
+ journal = {VDI BERICHTE},
+ year = {1998},
+ volume = {1405},
+ pages = {1\,-\,16},
+ publisher = {VDI VERLAG GMBH}
+}
+
+@ARTICLE{Mata06,
+ author = {A. Mata and A.J. Fleischmann and S. Roy},
+ title = {Fabrication of multi-layer {SU-8} microstructures},
+ journal = {J. Micromech. Microeng.},
+ year = {2006},
+ volume = {16},
+ pages = {276\,-\,284},
+ doi = {10.1088/0960-1317/16/2/012},
+ file = {SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/16/2/012}
+}
+
+@ARTICLE{Melz1996,
+ author = {K.A. Melzak and C.S. Sherwood and R.F.B. Turner and C.A. Haynes},
+ title = {Driving forces for {DNA} adsorption to silica in perchlorate solutions},
+ journal = {J. Colloid Interface Sci.},
+ year = {1996},
+ volume = {181},
+ pages = {635\,-\,644},
+ number = {2},
+ doi = {10.1006/jcis.1996.0421},
+ file = {:Allgemein\\Melzak-DNA-SiOx-Adsorption-1996.pdf:PDF},
+ publisher = {Elsevier},
+ url = {\newline http://dx.doi.org/10.1006/jcis.1996.0421}
+}
+
+@CONFERENCE{Menz02,
+ author = {W. Menz and R. Förster and A. Schoth and C. Müller},
+ title = {Non-conventional machining for microsystems},
+ booktitle = {Proc. 3rd Euspen Int. Conf.},
+ year = {2002},
+ pages = {37}
+}
+
+@ARTICLE{Mira00,
+ author = {S.F. Miralaï and others},
+ title = {Electrical and Optical Diagnostics of Dielectric Barrier Discharges
+ {(DBD) in He and N2} for Polymer Treatment},
+ journal = {Plasmas and Polymers},
+ year = {2000},
+ volume = {5},
+ pages = {63\,-\,77},
+ number = {2},
+ doi = {10.1023/A:1009531831404},
+ file = {:DBD\\Miralai-oxygen-impurity-2000.pdf:PDF},
+ url = {http://dx.doi.org/10.1023/A:1009531831404}
+}
+
+@INPROCEEDINGS{TOK06,
+ author = {K. Misumi and others},
+ title = {Faster sensitivity and non-antimonite permanent photoresist for {MEMS}},
+ booktitle = {Advances in Resist Technology and Processing XXIII},
+ year = {2006},
+ editor = {Qinghuang Lin},
+ volume = {6153},
+ series = {Proceedings of SPIE},
+ pages = {61534F},
+ organization = {SPIE},
+ doi = {10.1117/12.656249},
+ file = {TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:Photolacke\\TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:PDF},
+ url = {http://dx.doi.org/10.1117/12.656249}
+}
+
+@ARTICLE{TOK06-2,
+ author = {K. Misumi and K. Saito and A. Yamanouchi and T. Senzaki and H. Honma},
+ title = {Minute Tunnel Structure Formation with Permanent Film Photoresist},
+ journal = {J. Photopolym. Sci. Technol.},
+ year = {2006},
+ volume = {19},
+ pages = {57\,-\,62},
+ doi = {10.2494/photopolymer.19.57},
+ file = {TOK-Minute tunnel structure formation with permanent film photoresist.pdf:Photolacke\\TOK-Minute tunnel structure formation with permanent film photoresist.pdf:PDF},
+ url = {\newline http://dx.doi.org/10.2494/photopolymer.19.57}
+}
+
+@ARTICLE{Mull1988,
+ author = {W.M. Mullins and B.L. Averbach},
+ title = {Surface properties of silicon and aluminum oxide powders},
+ journal = {Surface Science},
+ year = {1988},
+ volume = {206},
+ pages = {41\,-\,51},
+ number = {1-2},
+ doi = {10.1016/0039-6028(88)90013-1},
+ file = {:DBD\\Mullins-Work function of AluOxide-1988.pdf:PDF},
+ publisher = {Elsevier},
+ url = {\href{http://dx.doi.org/10.1016/0039-6028(88)90013-1}{http://dx.doi.org/10.1016/0039-6028(88)90013-1}}
+}
+
+@ARTICLE{Murp1956,
+ author = {E.L. Murphy and R.H. {Good, Jr.}},
+ title = {Thermionic Emission, Field Emission, and the Transition Region},
+ journal = {Phys. Rev.},
+ year = {1956},
+ volume = {102},
+ pages = {1464 - 1473},
+ doi = {10.1103/PhysRev.102.1464},
+ file = {:DBD\\Murphy,Good - Thermionic Emission, Field Emission, and the Transition Region.pdf:PDF},
+ url = {http://dx.doi.org/10.1103/PhysRev.102.1464}
+}
+
+@ARTICLE{Muel1999,
+ author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P.
+ Boeuf},
+ title = {Self-Organized Filaments in Dielectric Barrier Glow Discharges},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {1999},
+ volume = {27},
+ pages = {20\,-\,21},
+ doi = {10.1109/27.763004},
+ file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/27.763004}
+}
+
+@ARTICLE{Naka01,
+ author = {A. Nakajima and K. Hashimoto and T. Watanabe},
+ title = {Recent studies on super-hydrophobic films},
+ journal = {Monatshefte für Chemie\,/\,Chemical Monthly},
+ year = {2001},
+ volume = {132},
+ pages = {31\,-\,41},
+ doi = {10.1007/s007060170142},
+ file = {:Allgemein\\TiO2-hydrophobic-Nakajima-2001.pdf:PDF},
+ publisher = {Springer},
+ url = {http://dx.doi.org/10.1007/s007060170142}
+}
+
+@ARTICLE{Niem1995,
+ author = {L. Niemeyer},
+ title = {A generalized approach to partial discharge modeling},
+ journal = {IEEE Transactions on Dielectrics and Electrical Insulation},
+ year = {1995},
+ volume = {2},
+ pages = {510\,-\,528},
+ number = {4},
+ doi = {10.1109/94.407017},
+ file = {:DBD\\Niemeyer 95 generalized approach partial discharges.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/94.407017}
+}
+
+@ARTICLE{Noes04,
+ author = {M. Noeske and J. Degenhardt and S. Strudthoff and U. Lommatzsch},
+ title = {Plasma jet treatment of five polymers at atmospheric pressure: surface
+ modifications and the relevance for adhesion},
+ journal = {International Journal of Adhesion \& Adhesives},
+ year = {2004},
+ volume = {24},
+ pages = {171\,-\,177},
+ doi = {10.1016/j.ijadhadh.2003.09.006},
+ file = {:DBD\\Noeske03-plasma jet treatment.pdf:PDF},
+ url = {http://dx.doi.org/10.1016/j.ijadhadh.2003.09.006}
+}
+
+@ARTICLE{Nord1928,
+ author = {L. Nordheim},
+ title = {Zur Theorie der thermischen Emission und der Reflexion von Elektronen
+ an Metallen},
+ journal = {Zeitschrift für Physik A Hadrons and Nuclei},
+ year = {1928},
+ volume = {46},
+ pages = {833\,-\,855},
+ number = {11\,-\,12},
+ month = {November},
+ doi = {10.1007/BF01391020},
+ file = {:DBD\\Nordheim-1928.pdf:PDF},
+ url = {http://dx.doi.org/10.1007/BF01391020}
+}
+
+@CONFERENCE{Nuss09,
+ author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten},
+ title = {Micromixing Structures for Lab-on Chip Applications: Fabrication
+ and Simulation of 90° Zigzag Microchann els in Dry Film Resist},
+ booktitle = {4M\,/\,ICOMM 2009 Conference},
+ year = {2009},
+ pages = {215\,-\,218},
+ doi = {10.1243/17547164C0012009041},
+ file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF},
+ owner = {usti},
+ url = {http://dx.doi.org/10.1243/17547164C0012009041}
+}
+
+@ARTICLE{Obri01,
+ author = {J. O'Brien},
+ title = {Advanced photoresist technologies for microsystems},
+ journal = {J. Micromech. Microeng.},
+ year = {2001},
+ volume = {11},
+ pages = {353\,-\,358},
+ doi = {10.1088/0960-1317/11/4/312},
+ file = {OBrien01.pdf:Photolacke\\OBrien01.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/11/4/312}
+}
+
+@ARTICLE{Ohl1999,
+ author = {A. Ohl and K. Schröder},
+ title = {Plasma-induced chemical micropatterning for cell culturing applications:
+ a brief review},
+ journal = {Surf. Coat. Technol.},
+ year = {1999},
+ volume = {116},
+ pages = {820\,-\,830},
+ doi = {10.1016/S0257-8972(99)00150-4},
+ file = {:DBD\\Ohl-SEM grid pattern-1999.pdf:PDF},
+ publisher = {Elsevier},
+ url = {\href{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}}
+}
+
+@PHDTHESIS{Olss1998,
+ author = {Anders Olsson},
+ title = {Valve-less Diffuser Micropumps},
+ school = {School of Electrical Engineering, Royal Institute of Technology,
+ Stockholm, Sweden},
+ year = {1998},
+ file = {:Allgemein\\1998 Valve-less diffuser micropumps.pdf:PDF},
+ url = {http://www.s3.kth.se/instrlab/research/dissertations/pdf/andersodoc.pdf}
+}
+
+@ARTICLE{Pan02,
+ author = {C.-T. Pan and H. Yang and S.-C. Shen and M.-C. Chou and H.-P. Chou},
+ title = {A low-temperature wafer bonding technique using patternable materials},
+ journal = {J. Micromech. Microeng.},
+ year = {2002},
+ volume = {12},
+ pages = {611\,-\,615},
+ doi = {10.1088/0960-1317/12/5/315},
+ file = {Wafer-Bonding-Pan.pdf:Photolacke\\Wafer-Bonding-Pan.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/12/5/315}
+}
+
+@ARTICLE{Park01,
+ author = {J. Park and I. Henins and H.W. Herrmann and G.S. Selwyn},
+ title = {Discharge phenomena of an atmospheric pressure radio-frequency capacitive
+ plasma source},
+ journal = {J. Appl. Phys.},
+ year = {2001},
+ volume = {89},
+ pages = {20\,-\,28},
+ doi = {10.1063/1.1323753},
+ file = {:DBD\\Park01-Discharge phenomena.pdf:PDF},
+ url = {http://dx.doi.org/10.1063/1.1323753}
+}
+
+@ARTICLE{Park05,
+ author = {S.-J. Park and K.S. Kim and J.G. Eden},
+ title = {Nanoporous alumina as a dielectric for microcavity plasma devices:
+ Multilayer {Al/AlO} structures},
+ journal = {Appl. Phys. Lett.},
+ year = {2005},
+ volume = {86},
+ pages = {221501},
+ doi = {10.1063/1.1923747},
+ file = {:DBD\\Park-Cavitiy Al2O3-2005.pdf:PDF},
+ publisher = {AIP},
+ url = {http://dx.doi.org/10.1063/1.1923747}
+}
+
+@ARTICLE{Pasc1889,
+ author = {F. Paschen},
+ title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure
+ bei verschiedenen Drucken erforderliche Potentialdifferenz}},
+ journal = {Annalen der Physik},
+ year = {1889},
+ volume = {273},
+ pages = {69\,-\,96},
+ number = {5},
+ doi = {10.1002/andp.18892730505},
+ file = {:DBD\\Paschen-1889.pdf:PDF},
+ url = {http://dx.doi.org/10.1002/andp.18892730505}
+}
+
+@ARTICLE{Payn02,
+ author = {W.G. Payne and B.W. James and I.S. Falconer},
+ title = {The Growth and Decay of Miniature Dielectric Barrier Discharges in
+ Helium, Neon, and Argon},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {2002},
+ volume = {30},
+ pages = {170\,-\,171},
+ doi = {10.1109/TPS.2002.1003978},
+ file = {Payne-Discharge-Growth-2002.pdf:DBD\\Payne-Discharge-Growth-2002.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/TPS.2002.1003978}
+}
+
+@MISC{PCI,
+ author = {{PCI-SIG}},
+ title = {{PCI} Conventional specifications},
+ howpublished = {Internet:\newline http://www.pcisig.com/specifications/conventional
+ (accessed 08-01-2010)},
+ url = {http://www.pcisig.com/specifications/conventional}
+}
+
+@ARTICLE{Pena04,
+ author = {C. Penache and C. Gessner and T. Betker and V. Bartels and C.-P.
+ Klages},
+ title = {Plasma printing: patterned surface functionalisation and coating
+ at atmospheric pressure},
+ journal = {IEE Proc.-Nanobiotechnol.},
+ year = {2004},
+ volume = {151},
+ pages = {139\,-\,144},
+ booktitle = {Proceedings. 2nd VDE World Microtechnologies Congress, October 13
+ - 15, 2003},
+ doi = {10.1049/ip-nbt:20040836},
+ file = {:DBD\\Penache04-Printing.pdf:PDF},
+ url = {http://dx.doi.org/10.1049/ip-nbt:20040836}
+}
+
+@ARTICLE{Phel1999,
+ author = {A.V. Phelps and Z.Lj. Petrovic},
+ title = {Cold-cathode discharges and breakdown in argon: surface and gas phase
+ production of secondary electrons},
+ journal = {Plasma Sources Sci. Technol.},
+ year = {1999},
+ volume = {8},
+ pages = {21\,-\,44},
+ doi = {10.1088/0963-0252/8/3/201},
+ file = {:DBD\\Phelps-Petrovic-Secondary-emission-1999.pdf:PDF},
+ publisher = {IOP PUBLISHING},
+ url = {http://dx.doi.org/10.1088/0963-0252/8/3/201}
+}
+
+@INPROCEEDINGS{Rada07,
+ author = {A.D. Radadia and L. Cao and H.-K. Jeong and M.A. Shannon and R.I.
+ Masel},
+ title = {A {3D} Micromoxer Fabricated with Dry Film Resist},
+ booktitle = {Proc. of MEMS 2007},
+ year = {2007},
+ pages = {361\,-\,364},
+ doi = {10.1109/MEMSYS.2007.4433110},
+ file = {:Photolacke\\Radadia-3D micromixer-2007.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/MEMSYS.2007.4433110}
+}
+
+@ARTICLE{Radm07,
+ author = {M. Radmilovic-Radjenovic and Z.L. Petrovic and B. Radjenovic},
+ title = {Modelling of breakdown behavior by {PIC/MCC} code with improved secondary
+ emission models},
+ journal = {J. Phys.: Conf. Ser.},
+ year = {2007},
+ volume = {71},
+ pages = {012007},
+ number = {1},
+ booktitle = {Journal of Physics: Conference Series},
+ doi = {10.1088/1742-6596/71/1/012007},
+ file = {:DBD\\Radjenovic-secondary-emisson-2007.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/1742-6596/71/1/012007}
+}
+
+@ARTICLE{Radu03,
+ author = {I. Radu and R. Bartnikas and G. Czeremuszkin and M.R. Wertheimer},
+ title = {Diagnostics of Dielectric Barrier Discharges in Noble Gases: Atmospheric
+ Pressure Glow and Pseudoglow Discharges and Spatio-Temporal Patterns},
+ journal = {IEEE Trans. Plasma Sci.},
+ year = {2003},
+ volume = {31},
+ pages = {411\,-\,421},
+ number = {3},
+ doi = {10.1109/TPS.2003.811647},
+ file = {:DBD\\Radu-filament-noble-gases-2003.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/TPS.2003.811647}
+}
+
+@ARTICLE{Radu05,
+ author = {I. Radu and R. Bartnikas and M.R. Wertheimer},
+ title = {Diagnostics and modelling of noble gas atmospheric pressure dielectric
+ barrier discharges in homogeneous or diverging electric fields},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2005},
+ volume = {38},
+ pages = {539\,-\,546},
+ doi = {10.1088/0022-3727/38/4/005},
+ file = {Radu-filament-noble-gases-2005.pdf:DBD\\Radu-filament-noble-gases-2005.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/38/4/005}
+}
+
+@ARTICLE{Rao05,
+ author = {R.B. Rao and K.L. Krafcik and A.M. Morales and J. Lewis},
+ title = {Microfabricated deposition nozzles for direct-write assembly of three-dimensional
+ periodic structures},
+ journal = {Adv. Mater.},
+ year = {2005},
+ volume = {17},
+ pages = {289\,-\,293},
+ number = {3},
+ doi = {10.1002/adma.200400514},
+ file = {:Allgemein\\Rao-3D-ink-hexagonal-2005.pdf:PDF},
+ publisher = {Wiley-VCH Verlag GmbH},
+ url = {http://dx.doi.org/10.1002/adma.200400514}
+}
+
+@BOOK{Rich1921,
+ title = {The Emission of Electricity from Hot Bodies},
+ publisher = {Longmans, Green and co.},
+ year = {1921},
+ author = {O.W. Richardson},
+ url = {http://www.worldcat.org/wcpa/oclc/946804}
+}
+
+@ARTICLE{Sarr06,
+ author = {C. Sarra-Bournet and S. Turgeon and D. Mantovani and G. Laroche},
+ title = {A study of atmospheric pressure plasma discharges for surface functionalization
+ of {PTFE} used in biomedical applications},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2006},
+ volume = {39},
+ pages = {3461\,-\,3469},
+ number = {16},
+ doi = {10.1088/0022-3727/39/16/S03},
+ file = {:DBD\\Sarra-Bournet-treatment-time-2006.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/39/16/S03}
+}
+
+@ARTICLE{Sawa1995,
+ author = {Y. Sawada and S. Ogawa and M. Kogoma},
+ title = {Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane
+ films prepared by atmospheric pressure glow discharge},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {1995},
+ volume = {28},
+ pages = {1661\,-\,1661},
+ doi = {10.1088/0022-3727/28/8/015},
+ file = {:DBD\\Sawada-TEOS-SiOx-1995.pdf:PDF},
+ publisher = {IOP PUBLISHING LTD},
+ url = {http://dx.doi.org/10.1088/0022-3727/28/8/015}
+}
+
+@ARTICLE{Sche07,
+ author = {A. Schenk and others},
+ title = {Microstructured Electrode Arrays: Optical analysis of the Glow Discharge
+ in a Magnified Electrode Gap},
+ journal = {Plasma Process. Polym.},
+ year = {2007},
+ volume = {4},
+ pages = {S927\,-\,S930},
+ doi = {10.1002/ppap.200732301},
+ file = {:DBD\\Schenk-Optical-Analysis.pdf:PDF},
+ url = {http://dx.doi.org/10.1002/ppap.200732301}
+}
+
+@ARTICLE{Scho04,
+ author = {K.H. Schoenbach and M. Moselhy and W. Shi},
+ title = {Self-organization in cathode boundary layer microdischarges},
+ journal = {Plasma Sources Sci. Technol.},
+ year = {2004},
+ volume = {13},
+ pages = {177\,-\,185},
+ number = {1},
+ doi = {10.1088/0963-0252/13/1/023},
+ file = {:DBD\\Schoenbach-FilamentDiameter-2004.pdf:PDF},
+ publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
+ c1991-},
+ url = {http://dx.doi.org/10.1088/0963-0252/13/1/023}
+}
+
+@ARTICLE{Scho1999,
+ author = {U.P Schönholzer and L.J. Gauckler},
+ title = {Ceramic parts patterned in the micrometer range},
+ journal = {Adv. Mater.},
+ year = {1999},
+ volume = {11},
+ pages = {630\,-\,632},
+ number = {8},
+ file = {:Allgemein\\Schoenholzer-KeramikStrukturiertSintern1-1999.pdf:PDF},
+ publisher = {WILEY-VCH Verlag GmbH Weinheim},
+ url = {\href{http://www.cheric.org/research/tech/periodicals/doi.php?art_seq=646499}{http://www.cheric.org/research/tech/periodicals/doi.php?art\_seq=\newline 646499}}
+}
+
+@ARTICLE{Smit00,
+ author = {R.C. Smith and others},
+ title = {Chemical vapour deposition of the oxides of titanium, zirconium and
+ hafnium for use as high-k materials in microelectronic devices. A
+ carbon-free precursor for the synthesis of hafnium dioxide},
+ journal = {Adv. Mater. Opt. and Electron.},
+ year = {2000},
+ volume = {10},
+ pages = {105\,-\,114},
+ number = {3-5},
+ doi = {10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J},
+ file = {:DBD\\Smith-Ti-and-others-2000.pdf:PDF},
+ publisher = {John Wiley \& Sons, Ltd. Chichester, UK},
+ url = {\href{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}}
+}
+
+@BOOK{Socr1994,
+ title = {Infrared and Raman characteristic group frequencies: tables and charts},
+ publisher = {John Wiley \& Sons},
+ year = {1994},
+ author = {G. Socrates},
+ edition = {2nd}
+}
+
+@MISC{Lightning,
+ author = {J. R. Southern},
+ title = {Toronto thunderstorm},
+ howpublished = {Internet: \newline http://en.wikipedia.org/wiki/File:Krunkwerke\_-\_IMG\_4515\_\%28by-sa\%29.jpg
+ (accessed 07-09-2009)},
+ url = {http://en.wikipedia.org/wiki/File:Krunkwerke_-_IMG_4515_%28by-sa%29.jpg}
+}
+
+@CONFERENCE{Stal07,
+ author = {O. Stalter and B. Burger and S. Lehrmann},
+ title = {{Silicon Carbide (SiC) D-MOS for grid-feeding solar-inverters}},
+ booktitle = {European Conference on Power Electronics and Applications, 2007},
+ year = {2007},
+ pages = {1\,-\,10},
+ doi = {10.1109/EPE.2007.4417654},
+ file = {:Allgemein\\Stalter-SiC-Inverters-2007.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/EPE.2007.4417654}
+}
+
+@ARTICLE{Star06,
+ author = {S.M. Starikovskaia},
+ title = {Plasma assisted ignition and combustion},
+ journal = {J. Phys. D: Appl. Phys.},
+ year = {2006},
+ volume = {39},
+ pages = {R265\,-\,R299},
+ number = {16},
+ doi = {10.1088/0022-3727/39/16/R01},
+ file = {:DBD\\Starikovskaia-Streamer-overview-2006.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0022-3727/39/16/R01}
+}
+
+@ARTICLE{Step07,
+ author = {K. Stephan and others},
+ title = {Fast prototyping using a dry film photoresist: microfabrication of
+ soft-lithography masters for microfluidic structures},
+ journal = {J. Micromech. Microeng.},
+ year = {2007},
+ volume = {17},
+ pages = {N69\,-\,N74},
+ doi = {10.1088/0960-1317/17/10/N01},
+ file = {:Photolacke\\Stephan-DFR-Etertec-HQ-2007.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/17/10/N01}
+}
+
+@ARTICLE{Stoe10,
+ author = {U. Stöhr and others},
+ title = {Porous photoresist stamps for selective plasma treatment},
+ journal = {Plasma Processes Polym.},
+ year = {2010},
+ volume = {7},
+ pages = {9\,-\,15},
+ number = {1},
+ doi = {10.1002/ppap.200900063},
+ file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF},
+ url = {\newline http://dx.doi.org/10.1002/ppap.200900063}
+}
+
+@ARTICLE{Stoe09,
+ author = {Uwe Stöhr and others},
+ title = {Multilayer Photoresist Stamps for Selective Plasma Treatment in Micrometer
+ Scales},
+ journal = {Plasma Process. Polym.},
+ year = {2009},
+ volume = {6},
+ pages = {228\,-\,233},
+ number = {4},
+ doi = {10.1002/ppap.200800217},
+ file = {:DBD\\PlasmaPaper-Photoresist-finally-printed.pdf:PDF},
+ url = {http://dx.doi.org/10.1002/ppap.200800217}
+}
+
+@ARTICLE{Stoe08,
+ author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke},
+ title = {High-resolution permanent photoresist laminate for microsystem applications},
+ journal = {J. Micro/Nanolith. MEMS MOEMS},
+ year = {2008},
+ volume = {7},
+ pages = {033009},
+ doi = {10.1117/1.2964217},
+ file = {:Photolacke\\TMMFPaperSPIE-2Draft.pdf:PDF},
+ url = {http://dx.doi.org/10.1117/1.2964217}
+}
+
+@ARTICLE{Suk07,
+ author = {J.W. Suk and J. Cho},
+ title = {Capillary flow control using hydrophobic patterns},
+ journal = {J. Micromech. Microeng.},
+ year = {2007},
+ volume = {17},
+ pages = {N11\,-\,N15},
+ number = {4},
+ doi = {10.1088/0960-1317/17/4/N01},
+ file = {:Allgemein\\Suk-hydrophobic-channels-2007.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/17/4/N01}
+}
+
+@ARTICLE{Tan06,
+ author = {H.M.L. Tan and T. Akagi and T. Ichiki},
+ title = {Localized Plasma Treatment of Poly(dimethylsiloxane) Surfaces and
+ Its Application to Controlled Cell Cultivation},
+ journal = {J. Photopolym. Sci. Technol.},
+ year = {2006},
+ volume = {19},
+ pages = {245\,-\,250},
+ doi = {10.2494/photopolymer.19.245},
+ file = {:DBD\\Tan06-Plasmajet.pdf:PDF},
+ url = {http://dx.doi.org/10.2494/photopolymer.19.245}
+}
+
+@MISC{LyX,
+ author = {{The LyX Team}},
+ title = {LyX 1.6.x},
+ howpublished = {Internet: http://www.lyx.org},
+ url = {http://www.lyx.org}
+}
+
+@ARTICLE{Ther03,
+ author = {D. Therriault and S.R. White and J.A. Lewis},
+ title = {Chaotic mixing in three-dimensional microvascular networks fabricated
+ by direct-write assembly},
+ journal = {Nature Materials},
+ year = {2003},
+ volume = {2},
+ pages = {265\,-\,271},
+ number = {4},
+ doi = {10.1038/nmat863},
+ file = {:Allgemein\\Therriault-Ink-Channels-2003.pdf:PDF},
+ publisher = {Nature Publishing Group},
+ url = {http://dx.doi.org/10.1038/nmat863}
+}
+
+@INPROCEEDINGS{Thom06,
+ author = {M. Thomas and M. Eichler and C.-P. Klages},
+ title = {Coating with Atmospheric Pressure Plasma Processes: From Large Area
+ to \textmu{}-Structures},
+ booktitle = {49th Annual Technical Conference Proceedings},
+ year = {2006},
+ organization = {Society of Vacuum Coaters},
+ url = {http://tinyurl.com/Thomas06}
+}
+
+@ARTICLE{Thom07,
+ author = {M. Thomas and M. von Hausen and C.-P. Klages and P. Baumhof},
+ title = {Generation of Stable Coatings with Carboxylic Groups by Copolymerization
+ of {MAA} and {VTMS} using {DBD} at Atmospheric Pressure},
+ journal = {Plasma Process. Polym.},
+ year = {2007},
+ volume = {4},
+ pages = {S475\,-\,S481},
+ doi = {10.1002/ppap.200731210},
+ file = {:DBD\\Thomas-Carboxy-groups-2007.pdf:PDF},
+ publisher = {WILEY-VCH Verlag Weinheim},
+ url = {http://dx.doi.org/10.1002/ppap.200731210}
+}
+
+@BOOK{Town1915,
+ title = {Electricity in Gases},
+ publisher = {Clarendon Press},
+ year = {1915},
+ author = {J.S. Townsend},
+ url = {http://www.worldcat.org/wcpa/oclc/4294747}
+}
+
+@BOOK{Town1910,
+ title = {The Theory of Ionization of Gases by Collision},
+ publisher = {Constable},
+ year = {1910},
+ author = {J.S. Townsend},
+ url = {http://www.worldcat.org/wcpa/oclc/8460026}
+}
+
+@ARTICLE{Tsai06-2,
+ author = {Y.-C. Tsai and H.-P. Jen and K.-W. Lin and Y.-Z. Hsie},
+ title = {Fabrication of microfluidic devices using dry film photoresist for
+ microchip capillary electrophoresis},
+ journal = {J. Chromatogr. A},
+ year = {2006},
+ volume = {1111},
+ pages = {267\,-\,271},
+ doi = {0.1016/j.chroma.2005.12.003},
+ file = {AF-5000-Photolack-2.pdf:Photolacke\\AF-5000-Photolack-2.pdf:PDF},
+ url = {http://dx.doi.org/10.1016/j.chroma.2005.12.003}
+}
+
+@ARTICLE{Tsai06-1,
+ author = {Y.-C. Tsai and S.-J. Yang and H.-T. Lee and H.-P. Jen and Y.-Z. Hsieh},
+ title = {Fabrication of a Flexible and Disposable Microreactor Using a Dry
+ Film Photoresist},
+ journal = {J. Chin. Chem. Soc.},
+ year = {2006},
+ volume = {53},
+ pages = {683\,-\,688},
+ file = {AF-5000-Photolack.pdf:Photolacke\\AF-5000-Photolack.pdf:PDF},
+ url = {http://nr.stpi.org.tw/ejournal/ChiChemSociety/2006/EJ52-2006-683.pdf}
+}
+
+@ARTICLE{Uden1972,
+ author = {S. Udenfriend and others},
+ title = {Fluorescamine: A Reagent for Assay of Amino Acids, Peptides, Proteins,
+ and Primary Amines in the Picomole Range},
+ journal = {Science},
+ year = {1972},
+ volume = {178},
+ pages = {871\,-\,872},
+ doi = {10.1126/science.178.4063.871},
+ file = {:Allgemein\\Udenfriend-Fluorescamine-1972.pdf:PDF},
+ url = {http://dx.doi.org/10.1126/science.178.4063.871}
+}
+
+@ARTICLE{Velt05,
+ author = {T. Velten and others},
+ title = {Packaging of Bio-MEMS: Strategies, Technologies, and Applications},
+ journal = {IEEE trans. adv. packag.},
+ year = {2005},
+ volume = {28},
+ pages = {533\,-\,546},
+ doi = {10.1109/TADVP.2005.858427},
+ file = {Velten05-review.pdf:Photolacke\\Velten05-review.pdf:PDF},
+ url = {http://dx.doi.org/10.1109/TADVP.2005.858427}
+}
+
+@ARTICLE{Vora05,
+ author = {K.D. Vora and B.Y. Shew and E.C. Harvey and J.P. Hayes and A.G. Peele},
+ title = {{Specification of mechanical support structures to prevent SU-8 stiction
+ in high aspect ratio structures}},
+ journal = {J. Micromech. Microeng.},
+ year = {2005},
+ volume = {15},
+ pages = {978\,-\,983},
+ doi = {10.1088/0960-1317/15/5/012},
+ file = {SU-8-Aspektverhaeltnis-jmm2005.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm2005.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/15/5/012}
+}
+
+@CONFERENCE{Vult07,
+ author = {P. Vulto and G. Igel and G.A. Urban},
+ title = {Full wafer fabrication process for microfluidic glass chips with
+ electroplated electrodes},
+ booktitle = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
+ TRANSDUCERS 2007.},
+ year = {2007},
+ pages = {117\,-\,120},
+ doi = {10.1109/SENSOR.2007.4300085},
+ file = {:Photolacke\\Vult07.pdf:PDF},
+ journal = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
+ TRANSDUCERS 2007.},
+ url = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=4300085}
+}
+
+@INPROCEEDINGS{Vult06-2,
+ author = {P. Vulto and C. Klaunick and G. Igel and G. Urban},
+ title = {{tmRNA} purification by electrophoretic filtration for genomic identification
+ of bacteria on-a-chip},
+ booktitle = {Proceedings of \textmu{}TAS 2006},
+ year = {2006},
+ volume = {2},
+ pages = {377\,-\,379},
+ file = {:Photolacke\\tmRNA purification - MicroTAS2006.pdf:PDF}
+}
+
+@ARTICLE{Vult06,
+ author = {P. Vulto and others},
+ title = {Selective sample recovery of DEP-separated cells and particles by
+ phaseguide-controlled laminar flow},
+ journal = {J. Micromech. Microeng.},
+ year = {2006},
+ volume = {16},
+ pages = {1847\,-\,1853},
+ doi = {10.1088/0960-1317/16/9/013},
+ file = {Vult06.pdf:Photolacke\\Vult06.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/0960-1317/16/9/013}
+}
+
+@ARTICLE{Vult05,
+ author = {P. Vulto and others},
+ title = {Microfluidic channel fabrication in dry film resist for production
+ and prototyping of hybrid chips},
+ journal = {Lab on a Chip},
+ year = {2005},
+ volume = {5},
+ pages = {158\,-\,162},
+ doi = {10.1039/b411885e},
+ file = {Vulto-Ordyl.pdf:Photolacke\\Vulto-Ordyl.pdf:PDF},
+ url = {http://dx.doi.org/10.1039/b411885e}
+}
+
+@ARTICLE{Wang06,
+ author = {C. Wang and X. He},
+ title = {Polypropylene surface modification model in atmospheric pressure
+ dielectric barrier discharge},
+ journal = {Surface \& Coatings Technology},
+ year = {2006},
+ volume = {201},
+ pages = {3377\,-\,3384},
+ number = {6},
+ doi = {10.1016/j.surfcoat.2006.07.205},
+ file = {:DBD\\Wang-PP-Contact-Angle-2006.pdf:PDF},
+ publisher = {Elsevier},
+ url = {http://dx.doi.org/10.1016/j.surfcoat.2006.07.205}
+}
+
+@CONFERENCE{Wash05,
+ author = {Y. Washio and others},
+ title = {Multilayer ultra thick resist development for {MEMS}},
+ booktitle = {Proceedings of SPIE},
+ year = {2005},
+ volume = {5753},
+ pages = {959},
+ doi = {10.1117/12.600227},
+ url = {http://dx.doi.org/10.1117/12.600227}
+}
+
+@ARTICLE{Will04,
+ author = {J.D. Williams and W. Wang},
+ title = {Microfabrication of an electromagnetic power relay using {SU-8 based
+ UV-LIGA} technology},
+ journal = {Microsystem Technologies},
+ year = {2004},
+ volume = {10},
+ pages = {699\,-\,705},
+ doi = {10.1007/s00542-004-0396-1},
+ file = {SU-8-Aspektverhaeltnis-2.pdf:Photolacke\\SU-8-Aspektverhaeltnis-2.pdf:PDF},
+ url = {http://dx.doi.org/10.1007/s00542-004-0396-1}
+}
+
+@ARTICLE{Xu07,
+ author = {X. Xu and L. Li and S. Wang and L. Zhao and T. Ye},
+ title = {Deposition of $\mathrm{SiO_x}$ films with a capacitively-coupled
+ plasma at atmospheric pressure},
+ journal = {Plasma Sources Sci. Technol.},
+ year = {2007},
+ volume = {16},
+ pages = {372\,-\,376},
+ number = {2},
+ doi = {10.1088/0963-0252/16/2/021},
+ file = {:DBD\\Xu-SiOx-DBD-2007.pdf:PDF},
+ publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
+ c1991-},
+ url = {http://dx.doi.org/10.1088/0963-0252/16/2/021}
+}
+
+@ARTICLE{Yama1996,
+ author = {K. Yamada and T. Haraguchi and T. Kajiyama},
+ title = {Plasma-graft polymerization of vinyl monomers with reactive groups
+ onto a surface of poly (p-phenylene terephthalamide) fiber},
+ journal = {J. Appl. Polym. Sci.},
+ year = {1996},
+ volume = {60},
+ pages = {1847\,-\,1853},
+ number = {11},
+ doi = {10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L},
+ file = {:DBD\\Yamada-epoxy-grafting-1996.pdf:PDF},
+ publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
+ url = {\href{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}}
+}
+
+@BOOK{Yasu05,
+ title = {Luminous Chemical Vapor Deposition and Interface Engineering},
+ publisher = {Marcel Dekker},
+ year = {2005},
+ editor = {Arthur T. Hubbard},
+ author = {Hirotsugu Yasuda},
+ volume = {122},
+ series = {Surfactant Science Series},
+ edition = {1st}
+}
+
+@ARTICLE{Yu06,
+ author = {L. Yu and others},
+ title = {Adhesive bonding with SU-8 at wafer level for microfluidic devices},
+ journal = {J. Phys.: Conf. Ser.},
+ year = {2006},
+ volume = {34},
+ pages = {776\,-\,781},
+ doi = {10.1088/1742-6596/34/1/128},
+ file = {Yu06.pdf:Photolacke\\Yu06.pdf:PDF},
+ url = {http://dx.doi.org/10.1088/1742-6596/34/1/128}
+}
+
+@ARTICLE{Zhan04,
+ author = {J. Zhang and M.B. Chan-Park and S.R. Conner},
+ title = {Effect of exposure dose on the replication fidelity and profile of
+ very high aspect ratio microchannels in {SU-8}},
+ journal = {Lab on a Chip},
+ year = {2004},
+ volume = {4},
+ pages = {646\,-\,653},
+ doi = {10.1039/b403304c},
+ file = {SU-8-Aspektverhaeltnis-Theorie.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Theorie.pdf:PDF},
+ url = {http://dx.doi.org/10.1039/b403304c}
+}
+
+@ARTICLE{Zhan1995,
+ author = {J. Zhang. and K. Kato and Y. Uyama and Y. Ikada},
+ title = {Surface graft polymerization of glycidyl methacrylate onto polyethylene
+ and the adhesion with epoxy resin},
+ journal = {J. Polymer Sci. Polymer Chem.},
+ year = {1995},
+ volume = {33},
+ pages = {2629\,-\,2638},
+ number = {15},
+ doi = {10.1002/pola.1995.080331509},
+ file = {:DBD\\Zhang-epoxy-grafting-PE-1995.pdf:PDF},
+ publisher = {John Wiley \& Sons, Inc. New York},
+ url = {http://dx.doi.org/10.1002/pola.1995.080331509}
+}
+
+@ARTICLE{Zhao1999,
+ author = {Y. Zhao and M.-W. Urban},
+ title = {Spectroscopic studies of microwave plasma reactions of maleic anhydride
+ on poly (vinylidene fluoride) surfaces: crystallinity and surface
+ reactions},
+ journal = {Langmuir},
+ year = {1999},
+ volume = {15},
+ pages = {3538\,-\,3544},
+ number = {10},
+ doi = {10.1021/la981310m},
+ file = {:DBD\\Zhao-Carboxy-on-PVDF-1999.pdf:PDF},
+ url = {http://dx.doi.org/10.1021/la981310m}
+}
+
+@ARTICLE{Zou01,
+ author = {X.P. Zou and E.T. Kang and K.G. Neoh and C.Q. Cui and T.B. Lim},
+ title = {Surface modification of poly (tetrafluoroethylene) films by plasma
+ polymerization of glycidyl methacrylate for adhesion enhancement
+ with evaporated copper},
+ journal = {Polymer},
+ year = {2001},
+ volume = {42},
+ pages = {6409\,-\,6418},
+ number = {15},
+ doi = {10.1016/S0032-3861(01)00113-6},
+ file = {:DBD\\Zou-epoxy-2001.pdf:PDF},
+ publisher = {Elsevier},
+ url = {\href{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}}
+}
+
+@BOOK{CRC07,
+ title = {CRC Handbook of Chemistry and Physics},
+ publisher = {Taylor and Francis},
+ year = {2007},
+ editor = {David R. Lide},
+ pages = {12-114},
+ edition = {87th},
+ file = {:DBD\\CRC-Work functions-2007.pdf:PDF},
+ url = {http:/www.hbcpnetbase.com}
+}
+
+@STANDARD{ASTME1294,
+ title = {{ASTM}~E~1294-89~(1999), Standard Test Method for Pore Size Characteristics
+ of Membrane Filters Using Automated Liquid Porosimeter},
+ organization = {ASTM International},
+ url = {http://www.astm.org/DATABASE.CART/WITHDRAWN/E1294.htm}
+}
+
+@STANDARD{ISO10780,
+ title = {{ISO}~10780:1994, Stationary source emissions -- Measurement of velocity
+ and volume flowrate of gas streams in ducts},
+ organization = {ISO},
+ url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=18855}
+}
+
+@STANDARD{ISO4003,
+ title = {{ISO}~4003:1977, Permeable sintered metal materials -- Determination
+ of bubble test pore size},
+ organization = {ISO},
+ url = {\newline http://www.iso.org/iso/catalogue\_detail.htm?csnumber=9678}
+}
+
+@STANDARD{ISO4287,
+ title = {{ISO}~4287~(1997), Geometrical Product Specifications Surface Texture
+ Profile Method Terms, Definitions and Surface Texture Parameters},
+ organization = {ISO},
+ url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=10132}
+}
+