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author | Anton Luka Å ijanec <anton@sijanec.eu> | 2023-02-27 00:15:03 +0100 |
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committer | Anton Luka Å ijanec <anton@sijanec.eu> | 2023-02-27 00:15:03 +0100 |
commit | 3fed51e23753255ffc6e660aaacf926e8ac735e7 (patch) | |
tree | dd815583d778fe36343d1843d30d4fb0d61d41e1 /inf/rn/dok/lyx/thesisExample.bib | |
parent | inf rn lyx (diff) | |
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diff --git a/inf/rn/dok/lyx/thesisExample.bib b/inf/rn/dok/lyx/thesisExample.bib new file mode 100644 index 0000000..250e6aa --- /dev/null +++ b/inf/rn/dok/lyx/thesisExample.bib @@ -0,0 +1,2126 @@ +% This file was created with JabRef 2.5. +% Encoding: Cp1252 + +@ARTICLE{Abgr07, + author = {P. Abgrall and A.-M. Gué}, + title = {Lab-on-chip technologies: making a microfluidic network and coupling + it into a complete microsystem---a review}, + journal = {J. Micromech. Microeng.}, + year = {2007}, + volume = {17}, + pages = {R15\,-\,R49}, + doi = {10.1088/0960-1317/17/5/R01}, + file = {Abgrall07-Review.pdf:Photolacke\\Abgrall07-Review.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/17/5/R01} +} + +@ARTICLE{Abgr06, + author = {P. Abgrall and others}, + title = {A novel fabrication method of flexible and monolithic {3D microfluidic + structures using lamination of SU-8} films}, + journal = {J. Micromech. Microeng.}, + year = {2006}, + volume = {16}, + pages = {113\,-\,121}, + doi = {10.1088/0960-1317/16/1/016}, + file = {SU-8-selbst-hergestellt.pdf:Photolacke\\SU-8-selbst-hergestellt.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/16/1/016} +} + +@ARTICLE{Abol05, + author = {S.N. Abolmasov and T. Shirafuji and K. Tachibana}, + title = {Submillimeter Dielectric Barrier Discharges at Atmospheric Pressure: + Edge Effect}, + journal = {IEEE Trans. Plasma Sci.}, + year = {2005}, + volume = {33}, + pages = {941\,-\,948}, + doi = {10.1109/TPS.2005.845093}, + file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF}, + review = {Priorität 1 + + Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.}, + url = {http://dx.doi.org/10.1109/TPS.2005.845093} +} + +@ARTICLE{Akis03, + author = {Yu.S. Akishev and A.V. Dem\textrm{'}yanov and V.B. Karal\textrm{'}nik + and A.E. Monich and N.I. Trushkin}, + title = {Comparison of the AC Barrier Corona with DC Positive and Negative + Coronas and Barrier Discharge}, + journal = {Plasma Physics Reports}, + year = {2003}, + volume = {29}, + pages = {90\,-\,100}, + doi = {10.1134/1.1538505}, + file = {Akishev-Comparison-BC-dischages-2003.pdf:DBD\\Akishev-Comparison-BC-dischages-2003.pdf:PDF}, + url = {http://www.triniti.ru/CTF\&VM/Articles/Demyanov3.pdf} +} + +@ARTICLE{Baba01, + author = {S.E. Babayan and others}, + title = {Deposition of silicon dioxide films with a non-equilibrium atmospheric-pressure + plasma jet}, + journal = {Plasma Sources Sci. Technol.}, + year = {2001}, + volume = {10}, + pages = {573\,-\,578}, + number = {4}, + doi = {10.1088/0963-0252/10/4/305}, + file = {:DBD\\Babayan-SiOx-2001.pdf:PDF}, + publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics, + c1991-}, + url = {http://dx.doi.org/10.1088/0963-0252/10/4/305} +} + +@ARTICLE{Beck06, + author = {K.H. Becker and K.H. Schoenbach and J.G. Eden}, + title = {Microplasmas and applications}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2006}, + volume = {39}, + pages = {R55\,-\,R70}, + doi = {10.1088/0022-3727/39/3/R01}, + file = {:DBD\\Becker_Overview microplasmas-2006.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/39/3/R01} +} + +@ARTICLE{Bile04, + author = {B. Bilenberg and T. Nielsen and B. Clausen and A. Kristensen}, + title = {PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with + integrated optics}, + journal = {J. Micromech. Microeng.}, + year = {2004}, + volume = {14}, + pages = {814\,-\,818}, + doi = {10.1088/0960-1317/14/6/008}, + file = {Bile04.pdf:Photolacke\\Bile04.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/14/6/008} +} + +@ARTICLE{Blan04, + author = {F. J. Blanco and others}, + title = {Novel three-dimensional embedded {SU-8} microchannels fabricated + using a low temperature full wafer adhesive bonding}, + journal = {J. Micromech. Microeng.}, + year = {2004}, + volume = {14}, + pages = {1047\,-\,1056}, + doi = {10.1088/0960-1317/14/7/027}, + file = {Blan04.pdf:Photolacke\\Blan04.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/14/7/027} +} + +@ARTICLE{Boga02, + author = {A. Bogaerts and E. Neyts and R. Gijbels and J. van der Mullen}, + title = {Gas discharge plasmas and their applications}, + journal = {Spectrochim. Acta. B Atom. Spectros.}, + year = {2002}, + volume = {57}, + pages = {609--658}, + number = {4}, + doi = {10.1016/S0584-8547(01)00406-2}, + file = {:Allgemein\\2002_gas discharge plasmas and their applications.pdf:PDF}, + publisher = {Elsevier}, + url = {\href{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}} +} + +@BOOK{Bohl1989, + title = {Technische Strömungslehre}, + publisher = {Vogel-Verlag, Würzburg}, + year = {1989}, + author = {Willi Bohl}, + edition = {8th}, + url = {http://www.worldcat.org/oclc/315749265} +} + +@ARTICLE{Bran07, + author = {R. Brandenburg and others}, + title = {Antimicrobial Treatment of Heat Sensitive Materials by Means of Atmospheric + Pressure {Rf}-Driven Plasma Jet}, + journal = {Contrib. Plasma Phys.}, + year = {2007}, + volume = {47}, + pages = {72\,-\,79}, + doi = {10.1002/ctpp.200710011}, + file = {:DBD\\Brandenburg07-PlasmaJet-microbial.pdf:PDF}, + url = {http://dx.doi.org/10.1002/ctpp.200710011} +} + +@ARTICLE{Bran05, + author = {R. Brandenburg and H.-E. Wagner and A.M. Morozov and K.V. Kozlov}, + title = {Axial and radial development of microdischarges of barrier discharges + in {N2/O2} mixtures at atmospheric pressure}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2005}, + volume = {38}, + pages = {1649\,-\,1657}, + number = {11}, + doi = {10.1088/0022-3727/38/11/003}, + file = {:DBD\\Brandenburg-DBD-characteristics-05.pdf:PDF}, + publisher = {London: The Institute of Physics and The Physical Society.}, + url = {http://dx.doi.org/10.1088/0022-3727/38/11/003} +} + +@CONFERENCE{Brea09, + author = {M.C. Breadmore and E. Candish and R.M. Guijt}, + title = {Dry film photoresist, saving time and money without compromising + on performance}, + booktitle = {\textmu TAS 2009}, + year = {2009} +} + +@BOOK{Bruu08, + title = {Theoretical Microfluidics}, + publisher = {Oxford University Press}, + year = {2008}, + author = {Henrik Bruus}, + url = {http://www.worldcat.org/oclc/176807166} +} + +@ARTICLE{Bull01, + author = {N.A. Bullett and others}, + title = {Direct imaging of plasma-polymerized chemical micropatterns}, + journal = {Surf. Interface Anal.}, + year = {2001}, + volume = {31}, + pages = {1074\,-\,1076}, + number = {11}, + doi = {10.1002/sia.1146}, + file = {:DBD\\Bullett-SEM mask pattern-2001.pdf:PDF}, + url = {http://dx.doi.org/10.1002/sia.1146} +} + +@ARTICLE{Carl04, + author = {J. Carlier and others}, + title = {Integrated microfluidics based on multi-layered SU-8 for mass spectrometry + analysis}, + journal = {J. Micromech. Microeng.}, + year = {2004}, + volume = {14}, + pages = {619\,-\,624}, + doi = {10.1088/0960-1317/14/4/024}, + file = {Carlier04.pdf:Photolacke\\Carlier04.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/14/4/024} +} + +@ARTICLE{Carl1977, + author = {Carlsson, DJ and Garton, A. and Wiles, DM}, + title = {The weatherability of polypropylene monofilaments. Effects of fiber + production conditions}, + journal = {Journal of Applied Polymer Science}, + year = {1977}, + volume = {21}, + pages = {2963\,-\,2978}, + number = {11}, + doi = {10.1002/app.1977.070211112}, + file = {:DBD\\Carlsson-PP-oxidation-1977.pdf:PDF}, + publisher = {Wiley Subscription Services, Inc., A Wiley Company New York}, + url = {http://dx.doi.org/10.1002/app.1977.070211112} +} + +@ARTICLE{Carr1903, + author = {W.R. Carr}, + title = {On the Laws Governing Electric Discharges in Gases at Low Pressures}, + journal = {Phil. Trans. Roy. Soc. Lond. Math. Phys. Sci.}, + year = {1903}, + volume = {201}, + pages = {403-433}, + doi = {10.1098/rsta.1903.0020}, + file = {:DBD\\Carr-Electric dischare at low pressure-1903.pdf:PDF}, + url = {http://dx.doi.org/10.1098/rsta.1903.0020} +} + +@ARTICLE{Chang00, + author = {H.-K. Chang and Y.-K. Kim}, + title = {{UV-LIGA process for high aspect ratio structure using stress barrier + and C-shaped etch hole}}, + journal = {Sensors and Actuators A}, + year = {2000}, + volume = {84}, + pages = {342\,-\,350}, + doi = {10.1016/S0924-4247(00)00408-8}, + file = {SU-8-Aspektverhaeltnis-Springer.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Springer.pdf:PDF}, + url = {\href{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}} +} + +@ARTICLE{Char1967, + author = {F.M. Charbonnier and C.J. Bennette and L.W.~Swanson}, + title = {Electrical Breakdown between Metal Electrodes in High Vacuum. I. + Theory}, + journal = {J. Appl. Phys.}, + year = {1967}, + volume = {38}, + pages = {627\,-\,633}, + doi = {10.1063/1.1709385}, + file = {:DBD\\Charbonnier-Breakdown-1967.pdf:PDF}, + publisher = {AIP}, + url = {http://dx.doi.org/10.1063/1.1709385} +} + +@ARTICLE{Char1967-2, + author = {F.M. Charbonnier and C.J. Bennette and L.W. Swanson}, + title = {Electrical Breakdown between Metal Electrodes in High Vacuum. II. + Experimental}, + journal = {J. Appl. Phys.}, + year = {1967}, + volume = {38}, + pages = {634\,-\,640}, + doi = {10.1063/1.1709386}, + file = {:DBD\\Charbonnier-Breakdown-1967-2.pdf:PDF}, + publisher = {AIP}, + url = {http://dx.doi.org/10.1063/1.1709386} +} + +@ARTICLE{Coog1996, + author = {J.J. Coogan and A.D. Sappey}, + title = {Distribution of {OH} within silent discharge plasma reactors}, + journal = {IEEE Trans. Plasma Sci.}, + year = {1996}, + volume = {24}, + pages = {91\,-\,92}, + number = {1}, + doi = {10.1109/27.491706}, + file = {:DBD\\Coogan-FilamentDiameter-1996.pdf:PDF}, + url = {http://dx.doi.org/10.1109/27.491706} +} + +@ARTICLE{Cutl1993, + author = {P. Cutler}, + title = {Theory of electron emission in high fields from atomically sharp + emitters: Validity of the Fowler-Nordheim equation}, + journal = {Progress in Surface Science}, + year = {1993}, + volume = {42}, + pages = {169\,-\,185}, + number = {1-4}, + doi = {10.1016/0079-6816(93)90068-7}, + file = {:DBD\\Cutler-Emission in high fields-1993.pdf:PDF}, + url = {\href{http://dx.doi.org/10.1016/0079-6816(93)90068-7}{http://dx.doi.org/10.1016/0079-6816(93)90068-7}} +} + +@BOOK{Davi1998, + title = {Metals handbook: desk edition}, + publisher = {ASM International}, + year = {1998}, + author = {J.R. Davis}, + pages = {1128}, + edition = {2nd} +} + +@ARTICLE{Dikm04, + author = {A.J. Dikmans and others}, + title = {A new compact disc format of high density array synthesis applied + to peptide nucleic acids and in situ {MALDI} analysis}, + journal = {Molecular diversity}, + year = {2004}, + volume = {8}, + pages = {197\,-\,207}, + number = {3}, + doi = {10.1023/B:MODI.0000036234.66238.4e}, + file = {:Allgemein\\Dikmans-Amino-array-2004.pdf:PDF}, + url = {http://dx.doi.org/10.1023/B:MODI.0000036234.66238.4e} +} + +@PHDTHESIS{Dora02, + author = {Rajesh Dorai}, + title = {Modeling of Atmospheric Pressure Plasma Processing of Gases and Surfaces}, + school = {University of Illinois at Urbana-Champaign}, + year = {2002}, + file = {:DBD\\Dorai-plasma-reactions-2002.pdf:PDF}, + url = {http://uigelz.eecs.umich.edu/pub/theses/rajesh_phd_thesis.pdf} +} + +@ARTICLE{Dora03, + author = {R. Dorai and M.J. Kushner}, + title = {A model for plasma modification of polypropylene using atmospheric + pressure discharges}, + journal = {J. Phys. D: Appl. Phys}, + year = {2003}, + volume = {36}, + pages = {666\,-\,685}, + number = {6}, + doi = {10.1088/0022-3727/36/6/309}, + file = {:DBD\\Dorai-PP-Surface-chemistry-2003.pdf:PDF}, + publisher = {IOP PUBLISHING LTD}, + url = {http://dx.doi.org/10.1088/0022-3727/36/6/309} +} + +@ARTICLE{Dush1923, + author = {S. Dushman}, + title = {Electron Emission from Metals as a Function of Temperature}, + journal = {Physical Review}, + year = {1923}, + volume = {21}, + pages = {623\,-\,636}, + doi = {10.1103/PhysRev.21.623}, + file = {:DBD\\Dushman-Thermionic-Emission-1923.pdf:PDF}, + publisher = {APS}, + url = {http://dx.doi.org/10.1103/PhysRev.21.623} +} + +@ARTICLE{Eden03, + author = {J.G. Eden and others}, + title = {Microplasma devices fabricated in silicon, ceramic, and metal/polymer + structures: arrays, emitters and photodetectors}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2003}, + volume = {36}, + pages = {2869\,-\,2877}, + doi = {10.1088/0022-3727/36/23/001}, + file = {:DBD\\Eden-Cavity Silicon-2003.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/36/23/001} +} + +@CONFERENCE{Eich05, + author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages}, + title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden + bei niedrigen Temperaturen}}, + booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg. + Berlin: VDE-Verlag, 2005, pp. 115-118}, + year = {2005}, + file = {Waferbonden_Eichler.pdf:DBD\\Waferbonden_Eichler.pdf:PDF}, + url = {http://www.vde-verlag.de/data/buecher.php?action=bookdetail\&vertriebsnr=562926} +} + +@ARTICLE{Elia1991, + author = {B. Eliasson and U. Kogelschatz}, + title = {Modeling and applications of silent discharge plasmas}, + journal = {IEEE Trans. Plasma Sci.}, + year = {1991}, + volume = {19}, + pages = {309\,-\,323}, + number = {2}, + doi = {10.1109/27.106829}, + file = {:DBD\\Eliasson-Modelling-1991.pdf:PDF}, + url = {http://dx.doi.org/10.1109/27.106829} +} + +@ARTICLE{Klei03, + author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others}, + title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially + Swollen Polymer Networks.}, + journal = {Macromol. Chem. Phys.}, + year = {2003}, + volume = {204}, + pages = {F24\,-\,F25} +} + +@INPROCEEDINGS{Fahl01, + author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr}, + title = {Deposition of multilayer optical coatings onto plastic webs by pulse + magnetron sputtering; challenges and opportunities}, + booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma + Processes (ISSP), p. 189, Kanazawa, Japan}, + year = {2001}, + file = {:Allgemein\\Fahrland-Sputtering-2001.pdf:PDF} +} + +@CONFERENCE{Flac02, + author = {W.W. Flack and H.A. Nguyen and E. Capsuto}, + title = {Characterization of a novel photoresist redistribution material for + advanced packaging applications}, + booktitle = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference + Series}, + year = {2002}, + volume = {4690}, + pages = {1203\,-\,1216}, + doi = {10.1117/12.474198}, + file = {:Photolacke\\SINR-resist-2002.pdf:PDF}, + url = {http://dx.doi.org/10.1117/12.474198} +} + +@ARTICLE{Forb1999, + author = {R.G. Forbes}, + title = {Refining the application of Fowler-Nordheim theory}, + journal = {Ultramicroscopy}, + year = {1999}, + volume = {79}, + pages = {11\,-\,23}, + doi = {10.1016/S0304-3991(99)00097-2}, + file = {:DBD\\Forbes - Refining the application of Fowler-Nordheim theory.pdf:PDF}, + url = {http://dx.doi.org/10.1016/S0304-3991(99)00097-2} +} + +@ARTICLE{Fowl1928, + author = {R.H. Fowler and L. Nordheim}, + title = {Electron Emission in Intense Electric Fields}, + journal = {Proceedings of the Royal Society of London. Series A, Containing + Papers of a Mathematical and Physical Character}, + year = {1928}, + volume = {119}, + pages = {173\,-\,181}, + number = {781}, + month = {May}, + file = {:DBD\\Fowler-Nordheim-1928.pdf:PDF}, + url = {http://www.jstor.org/pss/95023} +} + +@ARTICLE{Gabo1993, + author = {S.R. Gaboury and M.W. Urban}, + title = {Microwave plasma reactions of solid monomers with silicone elastomer + surfaces: a spectroscopic study}, + journal = {Langmuir}, + year = {1993}, + volume = {9}, + pages = {3225\,-\,3233}, + number = {11}, + doi = {10.1021/la00035a076}, + file = {:DBD\\Gaboury-Epoxy-on-PDMS-1993.pdf:PDF}, + publisher = {American Chemical Society}, + url = {http://dx.doi.org/10.1021/la00035a076} +} + +@MISC{GEKA, + author = {{GEKA~mbH}}, + title = {Destroying chemical warfare agents and contaminated military waste}, + howpublished = {Internet: http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html + (accessed 06-09-2009)}, + owner = {usti}, + url = {http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html} +} + +@MASTERSTHESIS{Gerb03, + author = {M. Gerbracht}, + title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher + Trocknungsverfahren}}, + school = {Fachhochschule Düsseldorf}, + year = {2003}, + type = {Diplomarbeit}, + file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF} +} + +@INPROCEEDINGS{Golub02-2, + author = {Yu.B. Golubovskii and V.A. Maiorov v J. Behnke and J.F. Behnke}, + title = {Stability of the barrier discharge relative to the filamentation}, + booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002), + Vol. 1, p. 235-236}, + year = {2002}, + file = {Golubovskii02-Filament-stability.pdf:DBD\\Golubovskii02-Filament-stability.pdf:PDF}, + url = {http://optics.phys.spbu.ru/~golub/articles/barrier2d\_16ESCAMPIG.pdf} +} + +@ARTICLE{Golub03, + author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke}, + title = {Modelling of the homogeneous barrier discharge in helium at atmospheric + pressure}, + journal = {J. Phys. D: Appl. Phys.}, + year = {2003}, + volume = {36}, + pages = {39\,-\,49}, + doi = {10.1088/0022-3727/36/1/306}, + file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0022-3727/36/1/306} +} + +@INPROCEEDINGS{Golub01, + author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke}, + title = {The role of emission from the dielectric surface in a homogeneous + barrier discharge in nitrogen}, + booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13 + July 2001) vol VIII p 3239-3244}, + year = {2001}, + file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF}, + url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_ISPC15.pdf} +} + +@MISC{Filament, + author = {Yu. B. Golubovskii}, + howpublished = {Internet:\newline http://optics.phys.spbu.ru/\textasciitilde{}golub/images/filament.jpg + (accessed 07-09-2009)}, + owner = {usti}, + url = {http://optics.phys.spbu.ru/~golub/images/filament.jpg} +} + +@INPROCEEDINGS{Golub02, + author = {Yu. B. Golubovskii and V. A. Maiorov and J. Behnke and J. F. Behnke}, + title = {Some Aspects of the Modeling of an Uniform Barrier Discharge in Nitrogen}, + booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002), + Vol. 1, p. 233-234}, + year = {2002}, + file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF}, + url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf} +} + +@MISC{GolubWeb, + author = {Yu. B. Golubovskii and others}, + title = {Homogeneous barrier discharge}, + howpublished = {Internet: http://optics.phys.spbu.ru/\textasciitilde{}golub/english/barrier.html}, + url = {http://optics.phys.spbu.ru/~golub/english/barrier.html} +} + +@ARTICLE{Goos1998, + author = {A. Goossens and E.L. Maloney and J Schoonman}, + title = {Gas-Phase Synthesis of Nanostructured Anatase $\mathrm{TiO_2}$}, + journal = {Chemical Vapor Deposition}, + year = {1998}, + volume = {4}, + pages = {109\,-\,114}, + number = {3}, + doi = {10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}, + file = {:DBD\\Goossens-TiCl4-1998.pdf:PDF}, + publisher = {WILEY-VCH Verlag GmbH Weinheim}, + url = {\href{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}} +} + +@ARTICLE{Graz08, + author = {I. Graz and A. Ebner and S. Bauer and C. Romanin and H. 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Polym.}, + year = {2009}, + volume = {6}, + pages = {228\,-\,233}, + number = {4}, + doi = {10.1002/ppap.200800217}, + file = {:DBD\\PlasmaPaper-Photoresist-finally-printed.pdf:PDF}, + url = {http://dx.doi.org/10.1002/ppap.200800217} +} + +@ARTICLE{Stoe08, + author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke}, + title = {High-resolution permanent photoresist laminate for microsystem applications}, + journal = {J. Micro/Nanolith. MEMS MOEMS}, + year = {2008}, + volume = {7}, + pages = {033009}, + doi = {10.1117/1.2964217}, + file = {:Photolacke\\TMMFPaperSPIE-2Draft.pdf:PDF}, + url = {http://dx.doi.org/10.1117/1.2964217} +} + +@ARTICLE{Suk07, + author = {J.W. Suk and J. Cho}, + title = {Capillary flow control using hydrophobic patterns}, + journal = {J. Micromech. 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Udenfriend and others}, + title = {Fluorescamine: A Reagent for Assay of Amino Acids, Peptides, Proteins, + and Primary Amines in the Picomole Range}, + journal = {Science}, + year = {1972}, + volume = {178}, + pages = {871\,-\,872}, + doi = {10.1126/science.178.4063.871}, + file = {:Allgemein\\Udenfriend-Fluorescamine-1972.pdf:PDF}, + url = {http://dx.doi.org/10.1126/science.178.4063.871} +} + +@ARTICLE{Velt05, + author = {T. Velten and others}, + title = {Packaging of Bio-MEMS: Strategies, Technologies, and Applications}, + journal = {IEEE trans. adv. packag.}, + year = {2005}, + volume = {28}, + pages = {533\,-\,546}, + doi = {10.1109/TADVP.2005.858427}, + file = {Velten05-review.pdf:Photolacke\\Velten05-review.pdf:PDF}, + url = {http://dx.doi.org/10.1109/TADVP.2005.858427} +} + +@ARTICLE{Vora05, + author = {K.D. Vora and B.Y. Shew and E.C. Harvey and J.P. Hayes and A.G. Peele}, + title = {{Specification of mechanical support structures to prevent SU-8 stiction + in high aspect ratio structures}}, + journal = {J. Micromech. Microeng.}, + year = {2005}, + volume = {15}, + pages = {978\,-\,983}, + doi = {10.1088/0960-1317/15/5/012}, + file = {SU-8-Aspektverhaeltnis-jmm2005.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm2005.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/15/5/012} +} + +@CONFERENCE{Vult07, + author = {P. Vulto and G. Igel and G.A. 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Vulto and others}, + title = {Selective sample recovery of DEP-separated cells and particles by + phaseguide-controlled laminar flow}, + journal = {J. Micromech. Microeng.}, + year = {2006}, + volume = {16}, + pages = {1847\,-\,1853}, + doi = {10.1088/0960-1317/16/9/013}, + file = {Vult06.pdf:Photolacke\\Vult06.pdf:PDF}, + url = {http://dx.doi.org/10.1088/0960-1317/16/9/013} +} + +@ARTICLE{Vult05, + author = {P. Vulto and others}, + title = {Microfluidic channel fabrication in dry film resist for production + and prototyping of hybrid chips}, + journal = {Lab on a Chip}, + year = {2005}, + volume = {5}, + pages = {158\,-\,162}, + doi = {10.1039/b411885e}, + file = {Vulto-Ordyl.pdf:Photolacke\\Vulto-Ordyl.pdf:PDF}, + url = {http://dx.doi.org/10.1039/b411885e} +} + +@ARTICLE{Wang06, + author = {C. Wang and X. He}, + title = {Polypropylene surface modification model in atmospheric pressure + dielectric barrier discharge}, + journal = {Surface \& Coatings Technology}, + year = {2006}, + volume = {201}, + pages = {3377\,-\,3384}, + number = {6}, + doi = {10.1016/j.surfcoat.2006.07.205}, + file = {:DBD\\Wang-PP-Contact-Angle-2006.pdf:PDF}, + publisher = {Elsevier}, + url = {http://dx.doi.org/10.1016/j.surfcoat.2006.07.205} +} + +@CONFERENCE{Wash05, + author = {Y. Washio and others}, + title = {Multilayer ultra thick resist development for {MEMS}}, + booktitle = {Proceedings of SPIE}, + year = {2005}, + volume = {5753}, + pages = {959}, + doi = {10.1117/12.600227}, + url = {http://dx.doi.org/10.1117/12.600227} +} + +@ARTICLE{Will04, + author = {J.D. Williams and W. Wang}, + title = {Microfabrication of an electromagnetic power relay using {SU-8 based + UV-LIGA} technology}, + journal = {Microsystem Technologies}, + year = {2004}, + volume = {10}, + pages = {699\,-\,705}, + doi = {10.1007/s00542-004-0396-1}, + file = {SU-8-Aspektverhaeltnis-2.pdf:Photolacke\\SU-8-Aspektverhaeltnis-2.pdf:PDF}, + url = {http://dx.doi.org/10.1007/s00542-004-0396-1} +} + +@ARTICLE{Xu07, + author = {X. Xu and L. Li and S. Wang and L. Zhao and T. Ye}, + title = {Deposition of $\mathrm{SiO_x}$ films with a capacitively-coupled + plasma at atmospheric pressure}, + journal = {Plasma Sources Sci. Technol.}, + year = {2007}, + volume = {16}, + pages = {372\,-\,376}, + number = {2}, + doi = {10.1088/0963-0252/16/2/021}, + file = {:DBD\\Xu-SiOx-DBD-2007.pdf:PDF}, + publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics, + c1991-}, + url = {http://dx.doi.org/10.1088/0963-0252/16/2/021} +} + +@ARTICLE{Yama1996, + author = {K. Yamada and T. 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Yu and others}, + title = {Adhesive bonding with SU-8 at wafer level for microfluidic devices}, + journal = {J. Phys.: Conf. Ser.}, + year = {2006}, + volume = {34}, + pages = {776\,-\,781}, + doi = {10.1088/1742-6596/34/1/128}, + file = {Yu06.pdf:Photolacke\\Yu06.pdf:PDF}, + url = {http://dx.doi.org/10.1088/1742-6596/34/1/128} +} + +@ARTICLE{Zhan04, + author = {J. Zhang and M.B. Chan-Park and S.R. Conner}, + title = {Effect of exposure dose on the replication fidelity and profile of + very high aspect ratio microchannels in {SU-8}}, + journal = {Lab on a Chip}, + year = {2004}, + volume = {4}, + pages = {646\,-\,653}, + doi = {10.1039/b403304c}, + file = {SU-8-Aspektverhaeltnis-Theorie.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Theorie.pdf:PDF}, + url = {http://dx.doi.org/10.1039/b403304c} +} + +@ARTICLE{Zhan1995, + author = {J. Zhang. and K. Kato and Y. Uyama and Y. Ikada}, + title = {Surface graft polymerization of glycidyl methacrylate onto polyethylene + and the adhesion with epoxy resin}, + journal = {J. Polymer Sci. Polymer Chem.}, + year = {1995}, + volume = {33}, + pages = {2629\,-\,2638}, + number = {15}, + doi = {10.1002/pola.1995.080331509}, + file = {:DBD\\Zhang-epoxy-grafting-PE-1995.pdf:PDF}, + publisher = {John Wiley \& Sons, Inc. New York}, + url = {http://dx.doi.org/10.1002/pola.1995.080331509} +} + +@ARTICLE{Zhao1999, + author = {Y. Zhao and M.-W. Urban}, + title = {Spectroscopic studies of microwave plasma reactions of maleic anhydride + on poly (vinylidene fluoride) surfaces: crystallinity and surface + reactions}, + journal = {Langmuir}, + year = {1999}, + volume = {15}, + pages = {3538\,-\,3544}, + number = {10}, + doi = {10.1021/la981310m}, + file = {:DBD\\Zhao-Carboxy-on-PVDF-1999.pdf:PDF}, + url = {http://dx.doi.org/10.1021/la981310m} +} + +@ARTICLE{Zou01, + author = {X.P. Zou and E.T. Kang and K.G. Neoh and C.Q. Cui and T.B. Lim}, + title = {Surface modification of poly (tetrafluoroethylene) films by plasma + polymerization of glycidyl methacrylate for adhesion enhancement + with evaporated copper}, + journal = {Polymer}, + year = {2001}, + volume = {42}, + pages = {6409\,-\,6418}, + number = {15}, + doi = {10.1016/S0032-3861(01)00113-6}, + file = {:DBD\\Zou-epoxy-2001.pdf:PDF}, + publisher = {Elsevier}, + url = {\href{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}} +} + +@BOOK{CRC07, + title = {CRC Handbook of Chemistry and Physics}, + publisher = {Taylor and Francis}, + year = {2007}, + editor = {David R. Lide}, + pages = {12-114}, + edition = {87th}, + file = {:DBD\\CRC-Work functions-2007.pdf:PDF}, + url = {http:/www.hbcpnetbase.com} +} + +@STANDARD{ASTME1294, + title = {{ASTM}~E~1294-89~(1999), Standard Test Method for Pore Size Characteristics + of Membrane Filters Using Automated Liquid Porosimeter}, + organization = {ASTM International}, + url = {http://www.astm.org/DATABASE.CART/WITHDRAWN/E1294.htm} +} + +@STANDARD{ISO10780, + title = {{ISO}~10780:1994, Stationary source emissions -- Measurement of velocity + and volume flowrate of gas streams in ducts}, + organization = {ISO}, + url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=18855} +} + +@STANDARD{ISO4003, + title = {{ISO}~4003:1977, Permeable sintered metal materials -- Determination + of bubble test pore size}, + organization = {ISO}, + url = {\newline http://www.iso.org/iso/catalogue\_detail.htm?csnumber=9678} +} + +@STANDARD{ISO4287, + title = {{ISO}~4287~(1997), Geometrical Product Specifications Surface Texture + Profile Method Terms, Definitions and Surface Texture Parameters}, + organization = {ISO}, + url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=10132} +} + |